发明授权
- 专利标题: Shutter
- 专利标题(中): 快门
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申请号: US10434190申请日: 2003-05-09
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公开(公告)号: US06929724B2公开(公告)日: 2005-08-16
- 发明人: Gordon Robert Green , Robert Kenneth Trowell
- 申请人: Gordon Robert Green , Robert Kenneth Trowell
- 申请人地址: GB Newport
- 专利权人: Trikon Technologies Limited
- 当前专利权人: Trikon Technologies Limited
- 当前专利权人地址: GB Newport
- 代理机构: Volentine Francos & Whitt, PLLC
- 优先权: GB0210660 20020509
- 主分类号: C23C14/22
- IPC分类号: C23C14/22 ; C23C14/00
摘要:
This invention relates to a shutter for use in physical vapour deposition apparatus having a chamber. The shutter, generally indicated at 5, is located in a side housing 6 of the vacuum chamber 7, whilst sputtering is taking place. Once the substrate 2 is treated, the substrate is removed from the chamber and the shutter is brought in to an operative position above a wafer pedestal or support 1. The shutter is mounted on an arm 8 using a fixing boss 10, the arm and the boss being magnetically coupled.
公开/授权文献
- US20030209199A1 Shutter 公开/授权日:2003-11-13
信息查询
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