- 专利标题: Method for determining an ESD/latch-up strength of an integrated circuit
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申请号: US10866863申请日: 2004-06-14
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公开(公告)号: US06930501B2公开(公告)日: 2005-08-16
- 发明人: Silke Bargstädt-Franke , Kai Esmark , Harald Gossner , Philipp Riess , Wolfgang Stadler , Martin Streibl , Martin Wendel
- 申请人: Silke Bargstädt-Franke , Kai Esmark , Harald Gossner , Philipp Riess , Wolfgang Stadler , Martin Streibl , Martin Wendel
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理机构: Eschweiler & Associates LLC
- 优先权: DE10162542 20011219
- 主分类号: H01L23/544
- IPC分类号: H01L23/544 ; H01L23/60 ; G01R31/26
摘要:
A method for determining an ESD/latch-up strength of an integrated circuit includes producing an integrated circuit and a test structure using the same fabrication process. Electrical parameters at the test structure are measured and characteristic values associated with the integrated circuit are derived from the measured parameter values, wherein the characteristic values characterize an ESD or latch-up characteristic curve associated with the integrated circuit. The method further includes testing whether the characteristic values in each case lie within a predetermined range assigned to them, wherein the ranges are chosen such that a desired ESD/latch-up strength is present if the characteristic values in each case lie within their range.
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