发明授权
- 专利标题: Method and apparatus for measuring the position of a phase interface during crystal growth
- 专利标题(中): 在晶体生长期间测量相界面的位置的方法和装置
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申请号: US10128856申请日: 2002-04-23
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公开(公告)号: US06932864B2公开(公告)日: 2005-08-23
- 发明人: Lutz Parthier , Frank-Thomas Lentes , Gunther Wehrhan , Burkhard Speit , Hans-Joerg Axmann
- 申请人: Lutz Parthier , Frank-Thomas Lentes , Gunther Wehrhan , Burkhard Speit , Hans-Joerg Axmann
- 申请人地址: DE Mainz
- 专利权人: Schott Glas
- 当前专利权人: Schott Glas
- 当前专利权人地址: DE Mainz
- 代理商 Michael J. Striker
- 优先权: DE10120730 20010427
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; C30B11/00 ; C30B29/12 ; C30B15/20 ; C30B19/10
摘要:
In the method and apparatus for measuring the position of the phase interface during growth of a crystal from a melt in a crystal growth container according to the VGF method an incident optical signal is propagated to the phase interface between the melt and the crystal through a window (16) in the container (10) and a received optical signal reflected from the phase interface (14) is measured to determine the position of the phase interface. The position of the phase interface is established from the reflected signal by triangulation with a confocal optic system, by interferometric balancing or by transit time of the optical signal. The window (16) is preferably mounted in a preferably tilted orientation at the end of a tube (15), which is immersed in the melt (12).
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