发明授权
US06943037B2 CMOS/MEMS integrated ink jet print head and method of forming same 有权
CMOS / MEMS集成喷墨打印头及其形成方法

CMOS/MEMS integrated ink jet print head and method of forming same
摘要:
An ink jet print head is formed of a silicon substrate that includes an integrated circuit formed therein for controlling operation of the print head. The silicon substrate has one or more ink channels formed therein along the longitudinal direction of the noble array. An insulating layer or layers overlie the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with an ink channel. The area comprising the nozzle openings forms a generally planar surface to facilitate maintenance of the printhead. A heater element is associated with each nozzle opening or bore for asymmetrically heating ink as ink passes through the nozzle opening or bore.
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