CMOS/MEMS integrated ink jet print head and method of operating same
    3.
    发明授权
    CMOS/MEMS integrated ink jet print head and method of operating same 失效
    CMOS / MEMS集成喷墨打印头及其操作方法

    公开(公告)号:US06502925B2

    公开(公告)日:2003-01-07

    申请号:US09792114

    申请日:2001-02-22

    IPC分类号: B41J205

    摘要: An ink jet print head is formed of a silicon substrate that includes an integrated circuit formed therein for controlling operation of the print head. The silicon substrate has one or more ink channels formed therein along the longitudinal direction of the nozzle array. An insulating layer or layers overlie the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with an ink channel. The area comprising the nozzle openings forms a generally planar surface to facilitate maintenance of the printhead. A heater element is associated with each nozzle opening or bore for asymmetrically heating ink as ink passes through the nozzle opening or bore.

    摘要翻译: 喷墨打印头由硅基板形成,该硅基板包括形成在其中的集成电路,用于控制打印头的操作。 硅基板沿着喷嘴阵列的纵向方向形成有一个或多个油墨通道。 绝缘层或层叠在硅衬底上,并且沿着衬底的长度形成有一系列或阵列的喷嘴开口或孔,并且每个喷嘴开口与油墨通道连通。 包括喷嘴开口的区域形成大致平坦的表面,以便于打印头的维护。 当墨水通过喷嘴开口或孔时,加热器元件与每个喷嘴开口或孔相关联,用于不对称地加热墨。

    Printer having mechanically-assisted ink droplet separation and method
of using same
    5.
    发明授权
    Printer having mechanically-assisted ink droplet separation and method of using same 失效
    具有机械辅助墨滴分离的打印机及其使用方法

    公开(公告)号:US6065825A

    公开(公告)日:2000-05-23

    申请号:US969299

    申请日:1997-11-13

    IPC分类号: B41J2/005 B41J2/14 G01D15/18

    摘要: A printer having mechanically-assisted ink droplet separation and method of using same, for separating an ink meniscus from an ink nozzle orifice while clearing-away particulate matter from about the orifice. In a preferred embodiment of the invention, a heater surrounds an orifice formed by the nozzle, the orifice having an ink meniscus residing therein. As the heater heats the ink meniscus, surface tension of the ink meniscus decreases, thereby causing the ink meniscus to extend outwardly from the orifice to define an extended ink meniscus. A cutter, which is disposed near the orifice, includes a plate member disposed opposite an outside surface of the nozzle so as to define a passage between the outside surface and the plate member. The plate member has an opening aligned with the orifice and in communication with the passage. A gas pressure regulator in communication with the passage supplies pressurized gas into the passage, which gas flows along the passage an through the opening. As the gas flows through the opening, it impinges the extended ink meniscus to separate the extended ink meniscus from the orifice. As the extended ink meniscus separates from the orifice, it forms an ink droplet that travels to a receiver medium, so that an ink spot is placed onto the receiver medium. Moreover, as the gas flows through the opening, the gas clears-away particulate matter from about the orifice.

    摘要翻译: 一种具有机械辅助墨滴分离的打印机及其使用方法,用于从墨喷嘴孔口分离墨水弯月面,同时从孔口周围清除颗粒物质。 在本发明的优选实施例中,加热器围绕由喷嘴形成的孔口,孔口具有驻留在其中的墨水弯月面。 当加热器加热油墨弯月面时,油墨弯月面的表面张力减小,从而使油墨弯月面从孔口向外延伸以限定延伸的油墨弯液面。 设置在孔口附近的切割器包括与喷嘴的外表面相对设置的板构件,以在外表面和板构件之间限定通道。 板构件具有与孔口对准并与通道连通的开口。 与通道连通的气体压力调节器将加压气体供应到通道中,该气体沿着通道A流过开口。 当气体流过开口时,其撞击延伸的墨水弯液面以将延伸的墨水弯液面与孔口分离。 随着延伸墨水弯月面与孔口分离,它形成一个墨滴,传送到接收介质,使得墨点被放置在接收介质上。 此外,当气体流过开口时,气体从孔口周围清除颗粒物质。

    Fluid ejector having an anisotropic surface chamber etch
    6.
    发明授权
    Fluid ejector having an anisotropic surface chamber etch 有权
    具有各向异性表面腔蚀刻的流体喷射器

    公开(公告)号:US07836600B2

    公开(公告)日:2010-11-23

    申请号:US11685259

    申请日:2007-03-13

    摘要: A method of forming a fluid chamber and a source of fluid impedance includes providing a substrate having a surface; depositing a first material layer on the surface of the substrate, the first material layer being differentially etchable with respect to the substrate; removing a portion of the first material layer thereby forming a patterned first material layer and defining the fluid chamber boundary location; depositing a sacrificial material layer over the patterned first layer; removing a portion of the sacrificial material layer thereby forming a patterned sacrificial material layer and further defining the fluid chamber boundary location; depositing at least one additional material layer over the patterned sacrificial material layer; forming a hole extending from the at least one additional material layer to the sacrificial material layer, the hole being positioned within the fluid chamber boundary location; removing the sacrificial material layer in the fluid chamber boundary location by introducing an etchant through the hole; forming the fluid chamber by introducing an etchant through the hole; and forming a source of fluid impedance.

    摘要翻译: 形成流体室和流体阻抗源的方法包括提供具有表面的基底; 在所述衬底的表面上沉积第一材料层,所述第一材料层相对于所述衬底可差分蚀刻; 去除第一材料层的一部分,从而形成图案化的第一材料层并限定流体室边界位置; 在所述图案化的第一层上沉积牺牲材料层; 去除牺牲材料层的一部分,从而形成图案化的牺牲材料层并进一步限定流体室边界位置; 在图案化的牺牲材料层上沉积至少一个附加材料层; 形成从所述至少一个附加材料层延伸到所述牺牲材料层的孔,所述孔位于所述流体室边界位置内; 通过在孔中引入蚀刻剂来除去流体室边界位置中的牺牲材料层; 通过在孔中引入蚀刻剂来形成流体室; 并形成流体阻抗源。

    CONTINUOUS FLUID JET EJECTOR WITH ANISOTROPICALLY ETCHED FLUID CHAMBERS
    7.
    发明申请
    CONTINUOUS FLUID JET EJECTOR WITH ANISOTROPICALLY ETCHED FLUID CHAMBERS 审中-公开
    连续流体喷射器,具有非均质蚀刻流体泡沫

    公开(公告)号:US20090295861A1

    公开(公告)日:2009-12-03

    申请号:US12540555

    申请日:2009-08-13

    IPC分类号: B41J2/165

    摘要: A fluid ejection device, a method of cleaning the device, and a method of operating the device are provided. The device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate and has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall. The first wall and the second wall are positioned at an angle other than 90° relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber.

    摘要翻译: 提供流体喷射装置,清洁装置的方法以及操作装置的方法。 该装置包括具有第一表面和与该第一表面相对的第二表面的基底。 喷嘴板形成在基板的第一表面上,并且具有喷嘴,流体被喷射通过该喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通并且具有第一壁和第二壁。 第一壁和第二壁相对于彼此以不同于90°的角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。

    Substrate etching method for forming connected features
    8.
    发明授权
    Substrate etching method for forming connected features 有权
    用于形成连接特征的基板蚀刻方法

    公开(公告)号:US07354522B2

    公开(公告)日:2008-04-08

    申请号:US10911183

    申请日:2004-08-04

    IPC分类号: H01L21/311 B44C1/22

    摘要: A method of etching a substrate and an article(s) formed using the method are provided. The method includes providing a substrate; coating a region of the substrate with a temporary material having properties that enable the temporary material to remain substantially intact during subsequent processing and enable the temporary material to be removed by a subsequent process that allows the substrate to remain substantially unaltered; removing a portion of the substrate to form a feature, at least some of the removed portion of the substrate overlapping at least a portion of the coated region of the substrate while allowing the temporary material substantially intact; and removing the temporary material while allowing the substrate to remain substantially unaltered.

    摘要翻译: 提供了使用该方法形成的蚀刻基板和制品的方法。 该方法包括提供基板; 用临时材料涂覆基材的区域,所述临时材料具有使得临时材料能够在随后的处理期间保持基本上完整的,并且使临时材料能够通过允许基材保持基本上不变的后续工艺来除去; 去除衬底的一部分以形成特征,衬底的至少部分被去除的部分与衬底的涂覆区域的至少一部分重叠,同时允许临时材料基本上完整; 并且移除临时材料同时允许基底基本上保持不变。

    Fluid ejector having an anisotropic surface chamber etch
    10.
    发明授权
    Fluid ejector having an anisotropic surface chamber etch 有权
    具有各向异性表面腔蚀刻的流体喷射器

    公开(公告)号:US07213908B2

    公开(公告)日:2007-05-08

    申请号:US10911186

    申请日:2004-08-04

    IPC分类号: B41J2/05

    摘要: A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance includes a physical structure located between the nozzle and the fluid delivery channel.

    摘要翻译: 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴,流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通,并且具有第一壁和第二壁,其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。