发明授权
- 专利标题: Gimballed conditioning apparatus
- 专利标题(中): 金球调节装置
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申请号: US10112399申请日: 2002-03-29
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公开(公告)号: US06949016B1公开(公告)日: 2005-09-27
- 发明人: Anthony de la Llera , Xuyen Pham
- 申请人: Anthony de la Llera , Xuyen Pham
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla & Gencarella, LLP
- 主分类号: B24B5/00
- IPC分类号: B24B5/00 ; B24B21/18 ; B24B37/04 ; B24B53/007
摘要:
A chemical mechanical planarization (CMP) conditioning apparatus is provided. The CMP conditioning apparatus is designed to connect to a positioning arm which is capable of applying the conditioning apparatus to a processing surface. Embodiments of the CMP conditioning apparatus include a housing configured to connect to the positioning arm, and one side of the housing having a concave gimbal surface. A puck holder that a convex gimbal surface configured to mate with the concave gimbal surface of the housing is further provided. Thee puck holder receives a conditioning puck that has an attach surface and an active surface. The concave gimbal surface and the convex gimbal surface define a projected gimbal point at about a plane defined at about the active surface of the conditioning puck.
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