发明授权
- 专利标题： Database interpolation method for optical measurement of diffractive microstructures
- 专利标题（中）： 衍射微观结构的光学测量数据库插值方法
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申请号： US10777353申请日： 2004-02-12
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公开(公告)号： US06950780B2公开(公告)日： 2005-09-27
- 发明人: Kenneth C. Johnson , Fred E. Stanke
- 申请人： Kenneth C. Johnson , Fred E. Stanke
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Stallman & Pollock LLP
- 主分类号： G01B11/00
- IPC分类号： G01B11/00 ; G01B11/14 ; G01N21/47 ; G01N21/95 ; G01N21/956 ; G02B5/18 ; G06F17/10 ; H01L21/66 ; G01N21/00
摘要：
A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.