发明授权
US06954274B2 Method of inspecting semiconductor integrated circuit which can quickly measure a cubic body 有权
检查能快速测量立方体的半导体集成电路的方法

Method of inspecting semiconductor integrated circuit which can quickly measure a cubic body
摘要:
A semiconductor integrated circuit inspecting apparatus inspecting a terminal provided on a mount surface of a semiconductor integrated circuit includes a light emitter, a photographing unit and an inspector. The light emitter emits a linear light obliquely to the mount surface. The photographing unit photographs the mount surface to which the light is emitted to output a photograph signal. The inspector inspects the terminal in accordance with the photograph signal. The photographing unit has N (N is a positive integer) photographing elements. The photograph signal is outputted respectively only from M (M is a positive integer smaller than the N) photographing elements of the N photographing elements.
信息查询
0/0