发明授权
US06963106B1 Memory array with memory cells having reduced short channel effects
有权
具有存储单元的存储器阵列具有减少的短通道效应
- 专利标题: Memory array with memory cells having reduced short channel effects
- 专利标题(中): 具有存储单元的存储器阵列具有减少的短通道效应
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申请号: US10839626申请日: 2004-05-04
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公开(公告)号: US06963106B1公开(公告)日: 2005-11-08
- 发明人: Richard Fastow , Yue-Song He , Kazuhiro Mizutani , Timothy Thurgate
- 申请人: Richard Fastow , Yue-Song He , Kazuhiro Mizutani , Timothy Thurgate
- 申请人地址: US CA Sunnyvale
- 专利权人: Spansion LLC
- 当前专利权人: Spansion LLC
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Farjami & Farjami LLP
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L27/115 ; H01L21/788
摘要:
According to one exemplary embodiment, a method for fabricating a floating gate memory array comprises a step of removing a dielectric material from an isolation region situated in a substrate to expose a trench, where the trench is situated between a first source region and a second source region, where the trench defines sidewalls in the substrate. The method further comprises implanting an N type dopant in the first source region, the second source region, and the sidewalls of the trench, where the N type dopant forms an N+ type region. The method further comprises implanting a P type dopant in the first source region, the second source region, and the sidewalls of the trench, where the P type dopant forms a P type region, and where the P type region is situated underneath the N+ type region.
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