发明授权
- 专利标题： Optical alignment detection system
- 专利标题（中）： 光学对准检测系统
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申请号： US10225325申请日： 2002-08-21
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公开(公告)号： US06970245B2公开(公告)日： 2005-11-29
- 发明人: Bernard S. Fritz , Aravind Padmanabhan , Peter Reutiman
- 申请人： Bernard S. Fritz , Aravind Padmanabhan , Peter Reutiman
- 申请人地址： US NJ Morristown
- 专利权人： Honeywell International Inc.
- 当前专利权人： Honeywell International Inc.
- 当前专利权人地址： US NJ Morristown
- 代理商 Kris T. Fredrick
- 主分类号： G01B11/00
- IPC分类号： G01B11/00 ; G01B11/27 ; G01N15/00 ; G01N15/02 ; G01N15/14 ; G01N35/08
摘要：
An optical alignment detection system for detecting the alignment of a first object relative to a second object is provided. One or more light sources and one or more light detectors, either or both of which are secured relative to the second object, are used to detect the position of one or more light scattering elements on the first object.
公开/授权文献
- US20030058445A1 Optical alignment detection system 公开/授权日：2003-03-27