Invention Grant
- Patent Title: Condensation particle counter
- Patent Title (中): 冷凝颗粒计数器
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Application No.: US10381251Application Date: 2001-09-20
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Publication No.: US06980284B2Publication Date: 2005-12-27
- Inventor: Kang-Ho Ahn , Sang-Soo Kim , Hae-Young Jeong
- Applicant: Kang-Ho Ahn , Sang-Soo Kim , Hae-Young Jeong
- Applicant Address: KR Kyunggi-Do
- Assignee: Hyundai Calibration & Certification Technologies Co., Ltd.
- Current Assignee: Hyundai Calibration & Certification Technologies Co., Ltd.
- Current Assignee Address: KR Kyunggi-Do
- Agency: Lowe Hauptman & Berner, LLP
- Priority: KR2000/56163 20000925
- International Application: PCT/KR01/01578 WO 20010920
- International Announcement: WO02/29382 WO 20020411
- Main IPC: H01L21/02
- IPC: H01L21/02 ; G01N15/00 ; G01N15/06 ; G01N15/14 ; G01N1/00

Abstract:
A condensation particle counter measures the number of ultra-fine particles by growing the ultra-fine particles through a condensing process. The counter includes a capillary in which vapor of operating liquid is condensed and the ultra-fine particles grow. An insulating material surrounds the capillary to shut out heat flow between the capillary and the environment. The condensation particle counter can use various operating liquids including alcohol and water, and can be also applied to semiconductor clean rooms.
Public/Granted literature
- US20040012772A1 Condensation particle counter Public/Granted day:2004-01-22
Information query
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