发明授权
US06987559B2 Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
失效
具有低横向刚度的振动衰减装置,以及包括其的曝光装置
- 专利标题: Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
- 专利标题(中): 具有低横向刚度的振动衰减装置,以及包括其的曝光装置
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申请号: US10272195申请日: 2002-10-15
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公开(公告)号: US06987559B2公开(公告)日: 2006-01-17
- 发明人: Alton H. Phillips , Hideaki Sakamoto , Michael B. Binnard
- 申请人: Alton H. Phillips , Hideaki Sakamoto , Michael B. Binnard
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Klarquist Sparkman, LLP
- 主分类号: G03B27/62
- IPC分类号: G03B27/62 ; G03B27/72 ; G03B27/42
摘要:
Devices are disclosed for placement between first and second masses for attenuating transmission of motions from one of the masses to the other. A general embodiment of such a device includes a fluid isolator and a lateral fluid bearing situated along a support axis. The fluid isolator includes a housing defining an isolator chamber pressurized with a gas at pressure Pisol. The fluid isolator is situated such that motion of the masses relative to each other along the support axis is at the fluid isolator, and lateral motion is at the lateral fluid bearing. The lateral fluid bearing includes first and second bearing surfaces that are transverse to the support axis. At least one such surface defines three channels: pressure channel, atmospheric pressure channel, and vacuum channel. In order from the isolator chamber, the pressure channel (at pressure PXYbearing≈Pisol) is first, the atmospheric pressure channel (at pressure Patm) is second, and the vacuum channel (at pressure Pvac) is third. From this general embodiment, a number of configurations are possible.
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