Invention Grant
- Patent Title: Multi-bit stacked-type non-volatile memory and manufacture method thereof
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Application No.: US10779607Application Date: 2004-02-18
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Publication No.: US06995061B2Publication Date: 2006-02-07
- Inventor: Ching-Nan Hsiao , Chi-Hui Lin , Ying-Cheng Chuang
- Applicant: Ching-Nan Hsiao , Chi-Hui Lin , Ying-Cheng Chuang
- Applicant Address: TW Taoyuan
- Assignee: Nanya Technology Corporation
- Current Assignee: Nanya Technology Corporation
- Current Assignee Address: TW Taoyuan
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW92117091A 20030624
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
The present invention discloses a multi-bit stacked-type non-volatile memory having a spacer-shaped floating gate and a manufacturing method thereof. The manufacturing method includes forming a patterned dielectric layer containing arsenic on a semiconductor substrate, wherein the patterned dielectric layer defines an opening as an active area. A dielectric spacer is formed on a side wall of the patterned dielectric layer and a gate dielectric layer is formed on the semiconductor substrate. A source/drain region is formed by thermal driving method making arsenic diffusion from the patterned dielectric layer into the semiconductor substrate. A spacer-shaped floating gate is formed on the side wall of the dielectric spacer and the gate dielectric layer. An interlayer dielectric layer is formed on the spacer-shaped floating gate. A control gate is formed on the interlayer dielectric layer and fills the opening of the active area.
Public/Granted literature
- US20040266108A1 Multi-bit stacked-type non-volatile memory and manufacture method thereof Public/Granted day:2004-12-30
Information query
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