Invention Grant
- Patent Title: Multi-process system
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Application No.: US10655210Application Date: 2003-09-04
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Publication No.: US07005010B2Publication Date: 2006-02-28
- Inventor: Eric Bergman , Dana Scranton , Erik Lund , Worm Lund
- Applicant: Eric Bergman , Dana Scranton , Erik Lund , Worm Lund
- Applicant Address: US MT Kalispell
- Assignee: Semitool, Inc.
- Current Assignee: Semitool, Inc.
- Current Assignee Address: US MT Kalispell
- Agency: Perkins Coie LLP
- Main IPC: B08B3/00
- IPC: B08B3/00 ; F23B7/00

Abstract:
A system for processing a workpiece includes an inner chamber pivotably supported within an outer chamber. The inner chamber has an opening to allow liquid to drain out. A motor pivots the inner chamber to bring the opening at or below the level of liquid in the inner chamber. As the inner chamber turns, liquid drains out. Workpieces within the inner chamber are supported on a holder or a rotor, which may be fixed or rotating. Multi processes may be performed within the inner chamber, reducing the need to move the workpieces between various apparatus and reducing risk of contamination.
Public/Granted literature
- US20040040573A1 Multi-process system Public/Granted day:2004-03-04
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