公开(公告)号：US07005010B2

公开(公告)日：2006-02-28

申请号：US10655210

申请日：2003-09-04

申请人： Eric Bergman ,  Dana Scranton ,  Erik Lund ,  Worm Lund

发明人： Eric Bergman ,  Dana Scranton ,  Erik Lund ,  Worm Lund

IPC分类号： B08B3/00 ,  F23B7/00

CPC分类号： B08B3/12 ,  Y10S134/902

摘要： A system for processing a workpiece includes an inner chamber pivotably supported within an outer chamber. The inner chamber has an opening to allow liquid to drain out. A motor pivots the inner chamber to bring the opening at or below the level of liquid in the inner chamber. As the inner chamber turns, liquid drains out. Workpieces within the inner chamber are supported on a holder or a rotor, which may be fixed or rotating. Multi processes may be performed within the inner chamber, reducing the need to move the workpieces between various apparatus and reducing risk of contamination.

公开(公告)号：US09573355B2

公开(公告)日：2017-02-21

申请号：US14310219

申请日：2014-06-20

申请人： Paul E. Nelson ,  Peter D. McCowin ,  Worm Lund

发明人： Paul E. Nelson ,  Peter D. McCowin ,  Worm Lund

IPC分类号： B32B38/00 ,  B29C33/30 ,  B29C43/10 ,  B29C43/36 ,  B29C70/44 ,  B29C70/46

CPC分类号： B32B38/0012 ,  B29C33/308 ,  B29C43/10 ,  B29C43/3642 ,  B29C70/44 ,  B29C70/46 ,  B29C2043/3626 ,  B29C2043/3644 ,  B29C2043/3647 ,  B32B2038/0028 ,  Y10T156/1028 ,  Y10T156/1041 ,  Y10T156/1043

摘要： A forming tool and method for its use with flat pre-preg composite laminate assemblies which incorporates a mandrel segmented into multiple forming blocks, the forming blocks sized to receive a draped composite laminate assembly with all portions of the composite laminate assembly spaced from a shaping surface on each block. A spline plate engages the shaping surface of the forming blocks to provide a neutral axis for maintaining the entire composite laminate assembly in tension during forming. In the exemplary embodiments, the draped composite laminate assembly is formed to the forming blocks from the flat composite laminate assembly and maintained in contact with the forming blocks using a vacuum bag. The mandrel forming blocks arc then displaced to a desired curvature on the spline plate.

摘要翻译： 一种成形工具和方法，用于与扁平预成型复合层压组件一起使用，其中组合有分段成多个成形块的心轴，成型块的尺寸适于接收复合叠层组件，所述复合叠层组件的所有部分与成形表面间隔开 在每个块。 花键板与成形块的成形表面接合以提供中性轴线，用于在成形期间保持整个复合层压组件的张力。 在示例性实施例中，所述复合层叠组合体由所述扁平复合层压组件形成于所述成型块上，并使用真空袋与所述成形块保持接触。 心轴形成块然后移动到花键板上的期望曲率。

公开(公告)号：US07074246B2

公开(公告)日：2006-07-11

申请号：US10157762

申请日：2002-05-28

申请人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

发明人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

IPC分类号： H01L21/00 ,  H01L21/64

CPC分类号： H01L21/67173 ,  C25D7/12 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/6723 ,  H01L21/67742 ,  Y10S414/141 ,  Y10T29/40 ,  Y10T29/41

摘要： The present invention provides for a semiconductor workpiece processing tool and methods for handling semiconductor workpiece therein. The semiconductor workpiece processing tool preferably includes an interface section comprising at least one interface module and a processing section comprising a plurality of processing modules for processing the semiconductor workpieces. The semiconductor workpiece processing tool may have a conveyor for transferring the semiconductor workpieces between the interface modules and the processing modules.

公开(公告)号：US4359114A

公开(公告)日：1982-11-16

申请号：US215019

申请日：1980-12-10

申请人： James D. Miller ,  Worm Lund ,  Donald W. Jones

发明人： James D. Miller ,  Worm Lund ,  Donald W. Jones

IPC分类号： E21B7/28 ,  E21B10/20 ,  E21B10/28

CPC分类号： E21B10/20 ,  E21B10/28 ,  E21B7/28

摘要： A raise bit (10) is constructed with a plurality of housings (30) secured to cutter carrier frame (14) and disposed about drive stem (12). Housings (30) include a rectangularly-shaped mounting box (48) for rotatably supporting an outboard roller cutter (28). Each housing (30) also includes an upright wall (34) having an upwardly tapered lug (40) extending along the upper edge portion thereof for seating within a correspondingly shaped groove (82) formed along the underside of shoulder section (78) of an L-shaped hanger bracket (68). A roller shell (72) is antifrictionally mounted on a spindle (70) extending outwardly from an upright section (76) of hanger bracket (68). Bracket (68) is held in hooked relationship over lug (40) by a pair of capscrews (74) extending downwardly through clearance holes formed in upright section (76) and engaging within a lower portion of upright wall (34).

摘要翻译： 提升位（10）构造有多个固定到刀架架（14）的壳体（30），并围绕驱动杆（12）设置。 壳体（30）包括用于可旋转地支撑舷外滚轮切割器（28）的矩形安装盒（48）。 每个外壳（30）还包括一个直立的壁（34），其具有沿着其上边缘部分延伸的向上锥形的凸缘（40），用于位于形成在一个相应形状的凹槽（82）内，该凹槽沿着肩部（78）的下侧形成， L形吊架（68）。 辊壳（72）被防止地安装在从衣架支架（68）的直立部分（76）向外延伸的心轴（70）上。 支架（68）通过一对通过向下延伸通过形成在直立部分（76）中的间隙孔并且接合在直立壁（34）的下部中的向上延伸的钩帽螺栓（74）而以钩状关系保持。

公开(公告)号：US08118959B2

公开(公告)日：2012-02-21

申请号：US11769082

申请日：2007-06-27

申请人： Paul E. Nelson ,  Peter D. McCowin ,  Worm Lund

发明人： Paul E. Nelson ,  Peter D. McCowin ,  Worm Lund

IPC分类号： B32B37/10

CPC分类号： B32B38/0012 ,  B29C33/308 ,  B29C43/10 ,  B29C43/3642 ,  B29C70/44 ,  B29C70/46 ,  B29C2043/3626 ,  B29C2043/3644 ,  B29C2043/3647 ,  B32B2038/0028 ,  Y10T156/1028 ,  Y10T156/1041 ,  Y10T156/1043

摘要： A forming tool and method for its use with flat pre-preg composite laminate assemblies which incorporates a mandrel segmented into multiple forming blocks, the forming blocks sized to receive a draped composite laminate assembly with all portions of the composite laminate assembly spaced from a shaping surface on each block. A spline plate engages the shaping surface of the forming blocks to provide a neutral axis for maintaining the entire composite laminate assembly in tension during forming. In the exemplary embodiments, the draped composite laminate assembly is formed to the forming blocks from the flat composite laminate assembly and maintained in contact with the forming blocks using a vacuum bag. The mandrel forming blocks are then displaced to a desired curvature on the spline plate.

摘要翻译： 一种成形工具和方法，用于与扁平预成型复合层压组件一起使用，其中组合有分段成多个成形块的心轴，成型块的尺寸适于接收复合叠层组件，所述复合叠层组件的所有部分与成形表面间隔开 在每个块。 花键板与成形块的成形表面接合以提供中性轴线，用于在成形期间保持整个复合层压组件的张力。 在示例性实施例中，所述复合层叠组合体由所述扁平复合层压组件形成于所述成型块上，并使用真空袋与所述成形块保持接触。 心轴形成块然后移动到花键板上的所需曲率。

公开(公告)号：US20050193537A1

公开(公告)日：2005-09-08

申请号：US11101834

申请日：2005-04-07

申请人： Robert Berner ,  Daniel Woodruff ,  Wayne Schmidt ,  Kevin Coyle ,  Vladimir Zila ,  Worm Lund

发明人： Robert Berner ,  Daniel Woodruff ,  Wayne Schmidt ,  Kevin Coyle ,  Vladimir Zila ,  Worm Lund

IPC分类号： H01L21/677 ,  B65G49/07 ,  C25D7/12 ,  H01L21/00 ,  B21F41/00

CPC分类号： H01L21/67173 ,  C25D7/12 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/6723 ,  H01L21/67742 ,  Y10S414/141 ,  Y10T29/40

摘要： The present invention provides for a semiconductor workpiece processing tool and methods for handling semiconductor workpiece therein. The semiconductor workpiece processing tool preferably includes an interface section comprising at least one interface module and a processing section comprising a plurality of processing modules for processing the semiconductor workpieces. The semiconductor workpiece processing tool may have a conveyor for transferring the semiconductor workpieces between the interface modules and the processing modules.

摘要翻译： 本发明提供一种用于在其中处理半导体工件的半导体工件加工工具和方法。 半导体工件加工工具优选地包括包括至少一个接口模块的接口部分和包括用于处理半导体工件的多个处理模块的处理部分。 半导体工件加工工具可以具有用于在接口模块和处理模块之间传送半导体工件的传送器。

公开(公告)号：US20150246522A1

公开(公告)日：2015-09-03

申请号：US14310219

申请日：2014-06-20

申请人： Paul E. Nelson ,  Peter D. McCowin ,  Worm Lund

发明人： Paul E. Nelson ,  Peter D. McCowin ,  Worm Lund

IPC分类号： B32B38/00

CPC分类号： B32B38/0012 ,  B29C33/308 ,  B29C43/10 ,  B29C43/3642 ,  B29C70/44 ,  B29C70/46 ,  B29C2043/3626 ,  B29C2043/3644 ,  B29C2043/3647 ,  B32B2038/0028 ,  Y10T156/1028 ,  Y10T156/1041 ,  Y10T156/1043

摘要： A forming tool and method for its use with flat pre-preg composite laminate assemblies which incorporates a mandrel segmented into multiple forming blocks, the forming blocks sized to receive a draped composite laminate assembly with all portions of the composite laminate assembly spaced from a shaping surface on each block. A spline plate engages the shaping surface of the forming blocks to provide a neutral axis for maintaining the entire composite laminate assembly in tension during forming. In the exemplary embodiments, the draped composite laminate assembly is formed to the forming blocks from the flat composite laminate assembly and maintained in contact with the forming blocks using a vacuum bag. The mandrel forming blocks arc then displaced to a desired curvature on the spline plate.

摘要翻译： 一种成形工具和方法，用于与扁平预成型复合层压组件一起使用，其中组合有分段成多个成形块的心轴，成型块的尺寸适于接收复合叠层组件，所述复合叠层组件的所有部分与成形表面间隔开 在每个块。 花键板与成形块的成形表面接合以提供中性轴线，用于在成形期间保持整个复合层压组件的张力。 在示例性实施例中，所述复合层叠组合体由所述扁平复合层压组件形成于所述成型块上，并使用真空袋与所述成形块保持接触。 心轴形成块然后移动到花键板上的期望曲率。

公开(公告)号：US06440178B1

公开(公告)日：2002-08-27

申请号：US09810192

申请日：2001-03-16

申请人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

发明人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

IPC分类号： H01L2100

摘要： The present invention provides for a semiconductor workpiece processing tool and methods for handling semiconductor workpiece therein. The semiconductor workpiece processing tool preferably includes an interface section comprising at least one interface module and a processing section comprising a plurality of processing modules for processing the semiconductor workpieces. The semiconductor workpiece processing tool may have a conveyor for transferring the semiconductor workpieces between the interface modules and the processing modules.

公开(公告)号：US5000682A

公开(公告)日：1991-03-19

申请号：US467937

申请日：1990-01-22

申请人： Donald W. Heidt ,  Steve Thompson ,  Worm Lund ,  Raymon F. Thompson ,  Larry M. Beasley

发明人： Donald W. Heidt ,  Steve Thompson ,  Worm Lund ,  Raymon F. Thompson ,  Larry M. Beasley

IPC分类号： F27D5/00

CPC分类号： F27D5/0037

摘要： Semiconductor wafers within a supporting vertical wafer tower are positioned within a vertical process chamber through a lower gate valve fixed to a supporting framework. The gate valve is sealed to a similar gate valve at the upper end of a movable load lock on the framework, within which the wafers are subjected to pre-treatment and post-treatment processes. Two load locks are alternately used in conjunction with the process chamber and a wafer loading station on the framework. In addition, a cleaning element is movably mounted on the framework for periodically maintaining the interior surfaces of the process tube within the process chamber.

摘要翻译： 支撑垂直晶片塔内的半导体晶片通过固定到支撑框架的下闸阀定位在垂直处理室内。 闸阀在框架上的可移动负载锁的上端处被密封到类似的闸阀，在其中晶片经过预处理和后处理过程。 两个负载锁与框架上的处理室和晶片加载站交替使用。 此外，清洁元件可移动地安装在框架上，用于周期性地将处理管的内表面保持在处理室内。

公开(公告)号：US08794957B2

公开(公告)日：2014-08-05

申请号：US13223188

申请日：2011-08-31

申请人： Peter D. McCowin ,  Paul E. Nelson ,  Worm Lund

发明人： Peter D. McCowin ,  Paul E. Nelson ,  Worm Lund

IPC分类号： B29C53/36

CPC分类号： B32B38/0012 ,  B29C33/308 ,  B29C43/10 ,  B29C43/3642 ,  B29C70/44 ,  B29C70/46 ,  B29C2043/3626 ,  B29C2043/3644 ,  B29C2043/3647 ,  B32B2038/0028 ,  Y10T156/1028 ,  Y10T156/1041 ,  Y10T156/1043

摘要： A forming tool and method for its use with flat pre-preg composite laminate assemblies which incorporates a mandrel segmented into multiple forming blocks, the forming blocks sized to receive a draped composite laminate assembly with all portions of the composite laminate assembly spaced from a shaping surface on each block. A spline plate engages the shaping surface of the forming blocks to provide a neutral axis for maintaining the entire composite laminate assembly in tension during forming. In the exemplary embodiments, the draped composite laminate assembly is formed to the forming blocks from the flat composite laminate assembly and maintained in contact with the forming blocks using a vacuum bag. The mandrel forming blocks are then displaced to a desired curvature on the spline plate.

摘要翻译： 一种成形工具和方法，用于与扁平预成型复合层压组件一起使用，其中组合有分段成多个成形块的心轴，成型块的尺寸适于接收复合叠层组件，所述复合叠层组件的所有部分与成形表面间隔开 在每个块。 花键板与成形块的成形表面接合以提供中性轴线，用于在成形期间保持整个复合层压组件的张力。 在示例性实施例中，所述复合层叠组合体由所述扁平复合层压组件形成于所述成型块上，并使用真空袋与所述成形块保持接触。 心轴形成块然后移动到花键板上的所需曲率。