发明授权
- 专利标题: MEMS piezoelectric longitudinal mode resonator
- 专利标题(中): MEMS压电纵模谐振器
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申请号: US10631695申请日: 2003-07-31
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公开(公告)号: US07005946B2公开(公告)日: 2006-02-28
- 发明人: Amy E. Duwel , David J. Carter , Mark J. Mescher , Mathew Varghese , Bernard M. Antkowiak , Marc S. Weinberg
- 申请人: Amy E. Duwel , David J. Carter , Mark J. Mescher , Mathew Varghese , Bernard M. Antkowiak , Marc S. Weinberg
- 申请人地址: US MA Cambridge
- 专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人地址: US MA Cambridge
- 代理机构: Goodwin Procter LLP
- 主分类号: H03H9/00
- IPC分类号: H03H9/00 ; H02N2/00 ; H01L41/04 ; H01L41/08 ; H01L41/18
摘要:
A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
公开/授权文献
- US20040027214A1 MEMS piezoelectric longitudinal mode resonator 公开/授权日:2004-02-12
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