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US07005946B2 MEMS piezoelectric longitudinal mode resonator 有权
MEMS压电纵模谐振器

MEMS piezoelectric longitudinal mode resonator
摘要:
A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
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