公开(公告)号：US07005946B2

公开(公告)日：2006-02-28

申请号：US10631695

申请日：2003-07-31

申请人： Amy E. Duwel ,  David J. Carter ,  Mark J. Mescher ,  Mathew Varghese ,  Bernard M. Antkowiak ,  Marc S. Weinberg

发明人： Amy E. Duwel ,  David J. Carter ,  Mark J. Mescher ,  Mathew Varghese ,  Bernard M. Antkowiak ,  Marc S. Weinberg

IPC分类号： H03H9/00 ,  H02N2/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18

CPC分类号： H03H3/02 ,  H03H9/172 ,  H03H9/564 ,  H03H9/586 ,  H03H2003/027 ,  H03H2009/241 ,  H04R17/00 ,  Y10T29/42 ,  Y10T29/435

摘要： A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.

摘要翻译： 一种纵模式谐振器，其包括相对于衬底悬挂的衬底和棒。 该杆被悬挂使得响应于其整个厚度上的电场的应用而使它自由地纵向膨胀和收缩。 棒的膨胀和收缩响应于具有与棒的基本频率基本相等的频率的场来实现谐振。

公开(公告)号：US5650568A

公开(公告)日：1997-07-22

申请号：US440536

申请日：1995-05-12

申请人： Paul Greiff ,  Bernard M. Antkowiak

发明人： Paul Greiff ,  Bernard M. Antkowiak

IPC分类号： B81B3/00 ,  G01C19/5712 ,  G01P15/08 ,  G01P15/125 ,  G01P9/04

CPC分类号： G01C19/5712 ,  B81B3/0051 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0242 ,  B81B2203/056 ,  B81B2203/058

摘要： A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis for providing an output torque about a coplanar output axis. The gyroscope also includes a post assembly extending between the support and the wheel assembly for supporting the wheel assembly. The wheel assembly has an inner hub, an outer wheel, and spoke flexures extending between the inner hub and the outer wheel and being stiff along both the input and output axes. A flexure is incorporated in the post assembly between the support and the wheel assembly inner hub and is relatively flexible along the output axis and relatively stiff along the input axis. Also provided is a single semiconductor crystal fabrication technique and a dissolved wafer fabrication technique. In one embodiment, the gyroscope includes comb drive electrodes. Also described is a box-shaped strain relief structure for use in the spoke flexures and additional strain relief features.

摘要翻译： 用于检测惯性空间中的旋转速度的摇摆陀螺陀螺仪。 陀螺仪包括定位在第一平面中的支撑件和布置在平行于第一平面的支撑件上的车轮组件。 车轮组件适于在第一平面中以预定频率旋转地旋转，并且响应于围绕共面输入轴的旋转速率，以提供围绕共面输出轴的输出扭矩。 陀螺仪还包括在支撑件和车轮组件之间延伸的支柱组件的支柱组件。 车轮组件具有内轮毂，外轮和在内轮毂和外轮之间延伸并且沿着输入轴和输出轴线都是刚性的轮辐弯曲件。 在支架和车轮组件内轮毂之间的后组件中并入弯曲部，并且沿着输出轴线相对柔性并且沿着输入轴线相对刚性。 还提供了单个半导体晶体制造技术和溶解晶片制造技术。 在一个实施例中，陀螺仪包括梳状驱动电极。 还描述了一种用于辐条弯曲和附加应变消除特征的箱形应变消除结构。