发明授权
US07075148B2 Semiconductor memory with vertical memory transistors in a cell array arrangement with 1-2F2 cells
失效
具有垂直存储晶体管的半导体存储器,其具有1-2F2个单元阵列
- 专利标题: Semiconductor memory with vertical memory transistors in a cell array arrangement with 1-2F2 cells
- 专利标题(中): 具有垂直存储晶体管的半导体存储器,其具有1-2F2个单元阵列
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申请号: US11073214申请日: 2005-03-05
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公开(公告)号: US07075148B2公开(公告)日: 2006-07-11
- 发明人: Franz Hofmann , Erhard Landgraf , Richard Johannes Luyken , Thomas Schulz , Michael Specht
- 申请人: Franz Hofmann , Erhard Landgraf , Richard Johannes Luyken , Thomas Schulz , Michael Specht
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理机构: Patterson & Sheridan, L.L.P.
- 优先权: DE10241173 20020905
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119
摘要:
The invention relates to a semiconductor memory having a multiplicity of memory cells, each of the memory cells having N (e.g., four) vertical memory transistors with trapping layers. Higher contact regions are formed in higher semiconductor regions extending obliquely with respect to the rows and columns of the cell array, the gate electrode generally being led to the step side areas of the higher semiconductor region. A storage density of 1-2F2 per bit can thus be achieved.
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