发明授权
US07075148B2 Semiconductor memory with vertical memory transistors in a cell array arrangement with 1-2F2 cells 失效
具有垂直存储晶体管的半导体存储器,其具有1-2F2个单元阵列

Semiconductor memory with vertical memory transistors in a cell array arrangement with 1-2F2 cells
摘要:
The invention relates to a semiconductor memory having a multiplicity of memory cells, each of the memory cells having N (e.g., four) vertical memory transistors with trapping layers. Higher contact regions are formed in higher semiconductor regions extending obliquely with respect to the rows and columns of the cell array, the gate electrode generally being led to the step side areas of the higher semiconductor region. A storage density of 1-2F2 per bit can thus be achieved.
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