发明授权
US07101654B2 Norbornene-type monomers and polymers containing pendent lactone or sultone groups
有权
含降冰片烯型单体和含有内酯或磺内酯的聚合物
- 专利标题： Norbornene-type monomers and polymers containing pendent lactone or sultone groups
- 专利标题（中）： 含降冰片烯型单体和含有内酯或磺内酯的聚合物
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申请号： US10757119申请日： 2004-01-14
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公开(公告)号： US07101654B2公开(公告)日： 2006-09-05
- 发明人: Xiaoming Wu , Larry F. Rhodes , Lawrence Seger
- 申请人： Xiaoming Wu , Larry F. Rhodes , Lawrence Seger
- 申请人地址： US OH Brecksville
- 专利权人： Promerus LLC
- 当前专利权人： Promerus LLC
- 当前专利权人地址： US OH Brecksville
- 代理商 Bernard Berman
- 主分类号： G03F7/039
- IPC分类号： G03F7/039 ; G03F7/075 ; G03F7/30 ; C08F28/06 ; C08G77/00
摘要：
The disclosed invention relates to novel norbornene-type monomers containing pendent lactone or sultone groups. The invention also relates to norbornene-type polymers and copolymers comprising one or more repeating units represented by the formula: and containing pendent lactone or sultone groups. These polymers and copolymers are useful in making photoimagable materials. The photoimagable materials are particularly suitable for use in photoresist compositions useful in 193 and 157 nm photolithography.
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