发明授权
- 专利标题: Angular rate sensor
- 专利标题(中): 角速度传感器
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申请号: US10942155申请日: 2004-09-16
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公开(公告)号: US07111511B2公开(公告)日: 2006-09-26
- 发明人: Toshiyuki Kawamura , Toru Matsunaga , Kazuo Kurihara , Shigeto Watanabe , Yoshinori Satoh
- 申请人: Toshiyuki Kawamura , Toru Matsunaga , Kazuo Kurihara , Shigeto Watanabe , Yoshinori Satoh
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sonnenschein Nath & Rosenthal LLP
- 优先权: JPP2003-346111 20031003
- 主分类号: G01C19/00
- IPC分类号: G01C19/00 ; G01P9/04
摘要:
An angular rate sensor includes: a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3; a reference electrode 3a which is formed on one main surface 3A of two opposed surfaces of the piezoelectric material 3, the one main surface 3A being bonded to the substrate 2, and which is connected to a reference potential; at least one drive electrode 3b which is formed on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in the longitudinal direction of the oscillator 1a, and to which a signal for oscillating the oscillator 1a is supplied; and at least a pair of detection electrodes 3c1 and 3c2 which are formed, in parallel with each other, on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in a manner to sandwich the drive electrode 3b, and which output a signal corresponding to Coriolis force generated in the oscillator 1a.
公开/授权文献
- US20050097954A1 Angular rate sensor 公开/授权日:2005-05-12
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