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公开(公告)号:US07111512B2
公开(公告)日:2006-09-26
申请号:US10956424
申请日:2004-10-01
CPC分类号: G01C19/5663
摘要: An angular rate sensor includes a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3, the piezoelectric material 3 is made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate 2 is made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young's modulus, thermal expansion coefficient, and the like.
摘要翻译: 角速率传感器包括通过层叠基板2和压电材料3而形成的二次棱镜状振荡器1a,压电材料3由包含PZT(锆钛酸铅)为主要成分的压电陶瓷构成,基板2 由相对于杨氏模量,热膨胀系数等的作为压电陶瓷的主要成分的具有等于或小于PZT的物理性质值的PZT以外的材料制成。
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公开(公告)号:US20050097954A1
公开(公告)日:2005-05-12
申请号:US10942155
申请日:2004-09-16
IPC分类号: G01C19/56 , G01C19/5642 , G01P15/14
CPC分类号: G01C19/5663
摘要: An angular rate sensor includes: a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3; a reference electrode 3a which is formed on one main surface 3A of two opposed surfaces of the piezoelectric material 3, the one main surface 3A being bonded to the substrate 2, and which is connected to a reference potential; at least one drive electrode 3b which is formed on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in the longitudinal direction of the oscillator 1a, and to which a signal for oscillating the oscillator 1a is supplied; and at least a pair of detection electrodes 3c1 and 3c2 which are formed, in parallel with each other, on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in a manner to sandwich the drive electrode 3b, and which output a signal corresponding to Coriolis force generated in the oscillator 1a.
摘要翻译: 角速度传感器包括:通过层叠基板2和压电材料3形成的二次棱镜状振荡器1a; 形成在压电材料3的两个相对表面的一个主表面3A上的参考电极3a,一个主表面3A结合到基板2,并连接到参考电位; 至少一个驱动电极3b,其形成在振荡器1a的纵向方向上的压电材料3的两个相对表面的另一个主表面3B上,并且提供用于振荡振荡器1a的信号的信号 ; 以及至少一对检测电极3 c 1和3 c 2,它们彼此平行地形成在两个相对的另一主表面3B上 压电材料3的表面以夹持驱动电极3b的方式输出,并且输出对应于在振荡器1a中产生的科里奥利力的信号。
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公开(公告)号:US07111511B2
公开(公告)日:2006-09-26
申请号:US10942155
申请日:2004-09-16
CPC分类号: G01C19/5663
摘要: An angular rate sensor includes: a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3; a reference electrode 3a which is formed on one main surface 3A of two opposed surfaces of the piezoelectric material 3, the one main surface 3A being bonded to the substrate 2, and which is connected to a reference potential; at least one drive electrode 3b which is formed on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in the longitudinal direction of the oscillator 1a, and to which a signal for oscillating the oscillator 1a is supplied; and at least a pair of detection electrodes 3c1 and 3c2 which are formed, in parallel with each other, on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in a manner to sandwich the drive electrode 3b, and which output a signal corresponding to Coriolis force generated in the oscillator 1a.
摘要翻译: 角速度传感器包括:通过层叠基板2和压电材料3形成的二次棱镜状振荡器1a; 形成在压电材料3的两个相对表面的一个主表面3A上的参考电极3a,一个主表面3A结合到基板2,并连接到参考电位; 至少一个驱动电极3b,其形成在振荡器1a的纵向方向上的压电材料3的两个相对表面的另一个主表面3B上,并且提供用于振荡振荡器1a的信号的信号 ; 以及至少一对检测电极3 c 1和3 c 2,它们彼此平行地形成在两个相对的另一主表面3B上 压电材料3的表面以夹持驱动电极3b的方式输出,并且输出对应于在振荡器1a中产生的科里奥利力的信号。
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公开(公告)号:US20050146618A1
公开(公告)日:2005-07-07
申请号:US10956424
申请日:2004-10-01
IPC分类号: G01C19/56 , G01C19/5663 , H01L41/08 , H01L41/187 , H04N5/228
CPC分类号: G01C19/5663
摘要: An angular rate sensor includes a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3, the piezoelectric material 3 is made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate 2 is made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young's modulus, thermal expansion coefficient, and the like.
摘要翻译: 角速率传感器包括通过层叠基板2和压电材料3而形成的二次棱镜状振荡器1a,压电材料3由包含PZT(锆钛酸铅)为主要成分的压电陶瓷构成,基板2 由相对于杨氏模量,热膨胀系数等的作为压电陶瓷的主要成分的具有等于或小于PZT的物理性质值的PZT以外的材料制成。
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公开(公告)号:US07210349B2
公开(公告)日:2007-05-01
申请号:US11175373
申请日:2005-07-07
CPC分类号: G01C19/5649 , Y10T74/1229
摘要: The present invention provides a drive circuit of an oscillation gyro including two piezoelectric elements formed in an oscillator, which includes an adding circuit for supplying a drive signal to one side faces of the two piezoelectric elements and adding signals obtained from the other side faces opposed to the one side faces of the piezoelectric elements, and an oscillation circuit adapted to be fed back with an addition output signal obtained by the adding circuit, wherein a sine wave signal obtained as an oscillation output of the oscillation circuit is supplied to the one side faces of the two piezoelectric elements as the drive signal. Thus, the drive circuit of the oscillation gyro which obtains the stable output with the simple configuration can be provided.
摘要翻译: 本发明提供了一种振荡陀螺仪的驱动电路,其包括形成在振荡器中的两个压电元件,该振荡陀螺仪包括用于向两个压电元件的一个侧面提供驱动信号的加法电路和从与 压电元件的一个侧面以及适用于由加法电路获得的相加输出信号反馈的振荡电路,其中作为振荡电路的振荡输出而获得的正弦波信号被提供给一个侧面 的两个压电元件作为驱动信号。 因此,可以提供以简单的结构获得稳定输出的振荡陀螺仪的驱动电路。
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公开(公告)号:US20060011000A1
公开(公告)日:2006-01-19
申请号:US11175373
申请日:2005-07-07
IPC分类号: G01C19/08
CPC分类号: G01C19/5649 , Y10T74/1229
摘要: The present invention provides a drive circuit of an oscillation gyro including two piezoelectric elements formed in an oscillator, which includes an adding circuit for supplying a drive signal to one side faces of the two piezoelectric elements and adding signals obtained from the other side faces opposed to the one side faces of the piezoelectric elements, and an oscillation circuit adapted to be fed back with an addition output signal obtained by the adding circuit, wherein a sine wave signal obtained as an oscillation output of the oscillation circuit is supplied to the one side faces of the two piezoelectric elements as the drive signal. Thus, the drive circuit of the oscillation gyro which obtains the stable output with the simple configuration can be provided.
摘要翻译: 本发明提供了一种振荡陀螺仪的驱动电路,其包括形成在振荡器中的两个压电元件,该振荡陀螺仪包括用于向两个压电元件的一个侧面提供驱动信号的加法电路和从与 压电元件的一个侧面以及适用于由加法电路获得的相加输出信号反馈的振荡电路,其中作为振荡电路的振荡输出而获得的正弦波信号被提供给一个侧面 的两个压电元件作为驱动信号。 因此,可以提供以简单的结构获得稳定输出的振荡陀螺仪的驱动电路。
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公开(公告)号:US20050188766A1
公开(公告)日:2005-09-01
申请号:US11027155
申请日:2004-12-30
申请人: Toru Matsunaga , Toshiyuki Kawamura , Yoshinori Satoh , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
发明人: Toru Matsunaga , Toshiyuki Kawamura , Yoshinori Satoh , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
IPC分类号: G01C19/56 , G01C19/5663 , G01P1/04 , G01P3/44 , G01P9/04
CPC分类号: G01C19/5663
摘要: An angular velocity sensor having a pillar-shaped vibrator and support members. The support members clamp the vibrator from above and below, at those parts where vibration nodes are formed when the vibrator vibrates. The support members mechanically support the vibrator and are electrically connected to the vibrator. The support members have an uppermost layer covered with a silver or gold coating at the electrically connected parts. Each support member has arms and connecting parts provided at the distal ends of the arms. The connecting parts have a notch each. The support members are electrically and mechanically connected with conductive adhesive provided in the notches, applied to both surfaces of the connecting part and containing silver particles as conductive filler.
摘要翻译: 具有柱状振动器和支撑构件的角速度传感器。 支撑构件在振动器振动时在振动节点形成的那些部分上下夹持振动器。 支撑构件机械地支撑振动器并且电连接到振动器。 支撑构件具有在电连接部分处用银或金涂层覆盖的最上层。 每个支撑构件具有设置在臂的远端处的臂和连接部。 连接部分各有一个凹口。 支撑构件与设置在凹口中的导电粘合剂电连接和机械连接,施加到连接部分的两个表面并且包含作为导电填料的银颗粒。
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公开(公告)号:US07296467B2
公开(公告)日:2007-11-20
申请号:US10957129
申请日:2004-10-01
申请人: Toshiyuki Kawamura , Yoshinori Satoh , Toru Matsunaga , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
发明人: Toshiyuki Kawamura , Yoshinori Satoh , Toru Matsunaga , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
CPC分类号: G01C19/5663
摘要: An angular velocity sensor 1 includes support members 10A1, 10A2, 10B1 and 10B2, bonded to two nodal points of a pillar-shaped oscillator, generated on oscillations of the oscillator, in a manner of sandwiching the nodal points from upper and lower sides of the oscillator. The support members simultaneously serve for mechanically supporting and providing for electrical connection of the oscillator. Upper support members 10A1, 10A2 and lower support members 10B1 and 10B2 for the nodal points include bent parts, the bent parts being bent in the same direction with respect to the longitudinal direction of the oscillator. The upper support members and lower support members also include arms 11 extending at right angles to the up-and-down direction and to the longitudinal direction of the oscillator and connecting portion 13 for the arms and the oscillator.
摘要翻译: 角速度传感器1包括支撑构件10A 1,10 A 2,10 B 1和10 B 2 SUB >,以从振荡器的上侧和下侧夹住节点的方式结合到在振荡器的振荡上产生的柱状振荡器的两个节点。 支撑构件同时用于机械地支撑并提供振荡器的电连接。 上支撑构件10 A 1,10 A 2和下支撑构件10 B 1和10 B 2,用于 节点包括弯曲部分,弯曲部分相对于振荡器的纵向方向在相同的方向上弯曲。 上支撑构件和下支撑构件还包括臂11,它们与上下方向成直角地延伸,并且还包括用于臂和振荡器的振荡器和连接部分13的纵向。
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公开(公告)号:US07140249B2
公开(公告)日:2006-11-28
申请号:US11027155
申请日:2004-12-30
申请人: Toru Matsunaga , Toshiyuki Kawamura , Yoshinori Satoh , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
发明人: Toru Matsunaga , Toshiyuki Kawamura , Yoshinori Satoh , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
IPC分类号: G01P9/04
CPC分类号: G01C19/5663
摘要: An angular velocity sensor having a pillar-shaped vibrator and support members. The support members clamp the vibrator from above and below, at those parts where vibration nodes are formed when the vibrator vibrates. The support members mechanically support the vibrator and are electrically connected to the vibrator. The support members have an uppermost layer covered with a silver or gold coating at the electrically connected parts. Each support member has arms and connecting parts provided at the distal ends of the arms. The connecting parts have a notch each. The support members are electrically and mechanically connected with conductive adhesive provided in the notches, applied to both surfaces of the connecting part and containing silver particles as conductive filler.
摘要翻译: 具有柱状振动器和支撑构件的角速度传感器。 支撑构件在振动器振动时在振动节点形成的那些部分上下夹持振动器。 支撑构件机械地支撑振动器并且电连接到振动器。 支撑构件具有在电连接部分处用银或金涂层覆盖的最上层。 每个支撑构件具有设置在臂的远端处的臂和连接部。 连接部分各有一个凹口。 支撑构件与设置在凹口中的导电粘合剂电连接和机械连接,施加到连接部分的两个表面并且包含作为导电填料的银颗粒。
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公开(公告)号:US20050115318A1
公开(公告)日:2005-06-02
申请号:US10957129
申请日:2004-10-01
申请人: Toshiyuki Kawamura , Yoshinori Satoh , Toru Matsunaga , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
发明人: Toshiyuki Kawamura , Yoshinori Satoh , Toru Matsunaga , Takeshi Maeda , Naoya Sasaki , Kazuhiro Chiba
IPC分类号: G01C19/56 , G01C19/5663 , H01L41/08 , H01L41/187 , G01P3/44
CPC分类号: G01C19/5663
摘要: Disclosed is an angular velocity sensor superior in shock-proofness and in assembling properties. The angular velocity sensor 1 includes support members 10A1, 10A2, 10B1 and 10B2, bonded to two nodal points of a pillar-shaped oscillator, generated on oscillations of the oscillator, in a manner of sandwiching the nodal points from upper and lower sides of the oscillator. The support members simultaneously serve for mechanically supporting and providing for electrical connection of the oscillator. Upper support members 10A1, 10A2 and lower support members 10B1 and 10B2 for the nodal points include bent parts halfway, the bent parts being bent in the same direction with respect to the longitudinal direction of the oscillator. The upper support members and lower support members also include arms 12 extending at right angles to the up-and-down direction and to the longitudinal direction of the oscillator and junction parts 13 for the arms and the oscillator.
摘要翻译: 公开了一种在防震性和组装性方面优异的角速度传感器。 角速度传感器1包括支撑构件10A 1,10 A 2,10 B 1和10 B 2 SUB >,以从振荡器的上侧和下侧夹住节点的方式结合到在振荡器的振荡上产生的柱状振荡器的两个节点。 支撑构件同时用于机械地支撑并提供振荡器的电连接。 上支撑构件10 A 1,10 A 2和下支撑构件10 B 1和10 B 2,用于 节点包括弯曲部分,弯曲部分相对于振荡器的纵向方向在相同的方向弯曲。 上支撑构件和下支撑构件还包括臂12,该臂12与上下方向成直角地延伸,并且还包括振荡器的纵向方向和用于臂和振荡器的接合部分13。
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