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公开(公告)号：US07111511B2
公开(公告)日：2006-09-26
申请号：US10942155
申请日：2004-09-16
CPC分类号： G01C19/5663
摘要： An angular rate sensor includes: a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3; a reference electrode 3a which is formed on one main surface 3A of two opposed surfaces of the piezoelectric material 3, the one main surface 3A being bonded to the substrate 2, and which is connected to a reference potential; at least one drive electrode 3b which is formed on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in the longitudinal direction of the oscillator 1a, and to which a signal for oscillating the oscillator 1a is supplied; and at least a pair of detection electrodes 3c1 and 3c2 which are formed, in parallel with each other, on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in a manner to sandwich the drive electrode 3b, and which output a signal corresponding to Coriolis force generated in the oscillator 1a.
摘要翻译： 角速度传感器包括：通过层叠基板2和压电材料3形成的二次棱镜状振荡器1a; 形成在压电材料3的两个相对表面的一个主表面3A上的参考电极3a，一个主表面3A结合到基板2，并连接到参考电位; 至少一个驱动电极3b，其形成在振荡器1a的纵向方向上的压电材料3的两个相对表面的另一个主表面3B上，并且提供用于振荡振荡器1a的信号的信号 ; 以及至少一对检测电极3 c 1和3 c 2，它们彼此平行地形成在两个相对的另一主表面3B上 压电材料3的表面以夹持驱动电极3b的方式输出，并且输出对应于在振荡器1a中产生的科里奥利力的信号。
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公开(公告)号：US20050146618A1
公开(公告)日：2005-07-07
申请号：US10956424
申请日：2004-10-01
IPC分类号： G01C19/56 , G01C19/5663 , H01L41/08 , H01L41/187 , H04N5/228
CPC分类号： G01C19/5663
摘要： An angular rate sensor includes a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3, the piezoelectric material 3 is made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate 2 is made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young's modulus, thermal expansion coefficient, and the like.
摘要翻译： 角速率传感器包括通过层叠基板2和压电材料3而形成的二次棱镜状振荡器1a，压电材料3由包含PZT（锆钛酸铅）为主要成分的压电陶瓷构成，基板2 由相对于杨氏模量，热膨胀系数等的作为压电陶瓷的主要成分的具有等于或小于PZT的物理性质值的PZT以外的材料制成。
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公开(公告)号：US07111512B2
公开(公告)日：2006-09-26
申请号：US10956424
申请日：2004-10-01
CPC分类号： G01C19/5663
摘要： An angular rate sensor includes a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3, the piezoelectric material 3 is made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate 2 is made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young's modulus, thermal expansion coefficient, and the like.
摘要翻译： 角速率传感器包括通过层叠基板2和压电材料3而形成的二次棱镜状振荡器1a，压电材料3由包含PZT（锆钛酸铅）为主要成分的压电陶瓷构成，基板2 由相对于杨氏模量，热膨胀系数等的作为压电陶瓷的主要成分的具有等于或小于PZT的物理性质值的PZT以外的材料制成。
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公开(公告)号：US20050097954A1
公开(公告)日：2005-05-12
申请号：US10942155
申请日：2004-09-16
IPC分类号： G01C19/56 , G01C19/5642 , G01P15/14
CPC分类号： G01C19/5663
摘要： An angular rate sensor includes: a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3; a reference electrode 3a which is formed on one main surface 3A of two opposed surfaces of the piezoelectric material 3, the one main surface 3A being bonded to the substrate 2, and which is connected to a reference potential; at least one drive electrode 3b which is formed on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in the longitudinal direction of the oscillator 1a, and to which a signal for oscillating the oscillator 1a is supplied; and at least a pair of detection electrodes 3c1 and 3c2 which are formed, in parallel with each other, on the other main surface 3B of the two opposed surfaces of the piezoelectric material 3 in a manner to sandwich the drive electrode 3b, and which output a signal corresponding to Coriolis force generated in the oscillator 1a.
摘要翻译： 角速度传感器包括：通过层叠基板2和压电材料3形成的二次棱镜状振荡器1a; 形成在压电材料3的两个相对表面的一个主表面3A上的参考电极3a，一个主表面3A结合到基板2，并连接到参考电位; 至少一个驱动电极3b，其形成在振荡器1a的纵向方向上的压电材料3的两个相对表面的另一个主表面3B上，并且提供用于振荡振荡器1a的信号的信号 ; 以及至少一对检测电极3 c 1和3 c 2，它们彼此平行地形成在两个相对的另一主表面3B上 压电材料3的表面以夹持驱动电极3b的方式输出，并且输出对应于在振荡器1a中产生的科里奥利力的信号。
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公开(公告)号：US20090320593A1
公开(公告)日：2009-12-31
申请号：US12306860
申请日：2007-06-29
申请人： Eiji Nakashio , Shigeto Watanabe , Shin Sasaki , Teruo Inaguma , Junichi Honda , Kazuo Kurihara , Yuji Shishido , Tomoyuki Takahashi
发明人： Eiji Nakashio , Shigeto Watanabe , Shin Sasaki , Teruo Inaguma , Junichi Honda , Kazuo Kurihara , Yuji Shishido , Tomoyuki Takahashi
CPC分类号： G01C19/5663
摘要： A vibration type gyro sensor according to the present invention includes vibrating elements 1X and 1Y which detect angular velocities, a support substrate 2 which is electrically connected to the vibrating elements 1X and 1Y and which supports the vibrating elements 1X and 1Y, a relay substrate 4 which is electrically connected to the support substrate 2 and which includes external connection terminals 3, and buffer members 5 which are disposed between the support substrate 2 and the relay substrate 4 and which suppress transmission of strain and vibration between the support substrate 2 and the relay substrate 4. The vibration type gyro sensor is capable of stabilizing vibration characteristics without being influenced by strain and vibration.
摘要翻译： 根据本发明的振动型陀螺传感器包括检测角速度的振动元件1X和1Y，与振动元件1X和1Y电连接并支撑振动元件1X和1Y的支撑基板2，中继基板4 电连接到支撑基板2并且包括设置在支撑基板2和中继基板4之间的外部连接端子3和缓冲部件5，并且抑制支撑基板2和继电器之间的应变和振动的传播 振动型陀螺传感器能够在不受应变和振动影响的情况下稳定振动特性。
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公开(公告)号：US20060197414A1
公开(公告)日：2006-09-07
申请号：US11368144
申请日：2006-03-03
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/113
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.
摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有多个平台的布线图案，以及安装在支撑基板的表面上的振动元件，其中至少两个振动元件安装在支撑基板上，用于检测不同的振动 轴向。
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公开(公告)号：US07723905B2
公开(公告)日：2010-05-25
申请号：US12116646
申请日：2008-05-07
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/08
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.
摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。 振动元件安装在支撑基板的表面上。 振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。 振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。 振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。 当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。
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公开(公告)号：US07400078B2
公开(公告)日：2008-07-15
申请号：US11368144
申请日：2006-03-03
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.
摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有多个平台的布线图案，以及安装在支撑基板的表面上的振动元件，其中至少两个振动元件安装在支撑基板上，用于检测不同的振动 轴向。
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公开(公告)号：US07654139B2
公开(公告)日：2010-02-02
申请号：US10599833
申请日：2006-02-23
申请人： Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
发明人： Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
CPC分类号： G01C19/5663 , G01C19/5656
摘要： To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.
摘要翻译： 通过简单的结构实现尺寸缩小和高Q值提高特性。 根据本发明的振动陀螺传感器1包括其上安装有电路元件的支撑基板2和布置在其上的多个焊盘4的布线图案; 以及安装在支撑基板的表面2-1上的振动元件20。 振动元件20包括具有安装表面22-2的基部22，该安装表面22-2设置有连接到该焊盘的多个端子25; 以及从基部22的一侧以悬臂方式一体地延伸并具有与基部22的安装面齐平的面向基板的表面的振动部23，面向基板的表面设置有第一电极 堆叠在第一电极层上的压电层28和堆叠在压电层上的第二电极层29,30。 振动元件20通过将端子25与设置在它们之间的金属突起26接合到平台4而安装在支撑基板2上。
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公开(公告)号：US20090174292A1
公开(公告)日：2009-07-09
申请号：US12116646
申请日：2008-05-07
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/04
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.
摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。 振动元件安装在支撑基板的表面上。 振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。 振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。 振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。 当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。
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