发明授权
- 专利标题: Leveler compounds
- 专利标题(中): 矫平剂化合物
-
申请号: US10453423申请日: 2003-06-04
-
公开(公告)号: US07128822B2公开(公告)日: 2006-10-31
- 发明人: Deyan Wang , Chunyi Wu , Robert D. Mikkola
- 申请人: Deyan Wang , Chunyi Wu , Robert D. Mikkola
- 申请人地址: US MA Marlborough
- 专利权人: Shipley Company, L.L.C.
- 当前专利权人: Shipley Company, L.L.C.
- 当前专利权人地址: US MA Marlborough
- 代理商 S. Matthew Cairns
- 主分类号: C25D3/38
- IPC分类号: C25D3/38 ; C23C16/00
摘要:
Compounds that function to provide level or uniform metal deposits are provided. These compounds are particularly useful in providing level copper deposits. Copper plating baths and methods of copper plating using these compounds are also provided. These baths and methods are useful for providing a planarized layer of copper on a substrate having small apertures. The compositions and methods provide complete fill of small apertures with reduced void formation.
公开/授权文献
- US20040249177A1 Leveler compounds 公开/授权日:2004-12-09
信息查询