发明授权
- 专利标题: Lithographic apparatus and device manufacturing method
- 专利标题(中): 平版印刷设备和器件制造方法
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申请号: US10950674申请日: 2004-09-28
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公开(公告)号: US07131999B2公开(公告)日: 2006-11-07
- 发明人: Jan Frederik Hoogkamp , Jan Jaap Kuit , Raimond Visser
- 申请人: Jan Frederik Hoogkamp , Jan Jaap Kuit , Raimond Visser
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman, LLP
- 主分类号: G03B27/58
- IPC分类号: G03B27/58
摘要:
A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support configured to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table configured to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and a robot configured to transfer an exchangeable object to and from a support region, the robot including an arm and an end effector, the end effector including a first and second carrier configured to carry respective exchangeable objects, and the end effector being rotatably connected to the arm of the robot around a rotation axis which extends substantially parallel to the support region.
公开/授权文献
- US20060066832A1 Lithographic apparatus and device manufacturing method 公开/授权日:2006-03-30
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