发明授权
US07135121B2 Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效
喷墨记录头,其制造方法和喷墨记录装置

Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus
摘要:
A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.
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