发明授权
- 专利标题: Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus
- 专利标题(中): 喷墨记录头,其制造方法和喷墨记录装置
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申请号: US10754712申请日: 2004-01-12
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公开(公告)号: US07135121B2公开(公告)日: 2006-11-14
- 发明人: Akira Matsuzawa , Masato Shimada , Tetsushi Takahashi
- 申请人: Akira Matsuzawa , Masato Shimada , Tetsushi Takahashi
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2000-007651 20000117; JP2000-020245 20000128; JP2000-229343 20000728; JP2000-332557 20001031
- 主分类号: B41J2/04
- IPC分类号: B41J2/04 ; H01L21/00
摘要:
A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.
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