发明授权
- 专利标题: Method of forming epitaxial silicon-comprising material
- 专利标题(中): 形成外延含硅材料的方法
-
申请号: US10931924申请日: 2004-09-01
-
公开(公告)号: US07144779B2公开(公告)日: 2006-12-05
- 发明人: Nirmal Ramaswamy , Gurtej S. Sandhu , Cem Basceri , Eric R. Blomiley
- 申请人: Nirmal Ramaswamy , Gurtej S. Sandhu , Cem Basceri , Eric R. Blomiley
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
The invention includes methods of forming epitaxial silicon-comprising material and methods of forming vertical transistors. In one implementation, a method of forming epitaxial silicon-comprising material includes providing a substrate comprising monocrystalline material. A first portion of the monocrystalline material is outwardly exposed while a second portion of the monocrystalline material is masked. A first silicon-comprising layer is epitaxially grown from the exposed monocrystalline material of the first portion and not from the monocrystalline material of the masked second portion. After growing the first silicon-comprising layer, the second portion of the monocrystalline material is unmasked. A second silicon-comprising layer is then epitaxially grown from the first silicon-comprising layer and from the unmasked monocrystalline material of the second portion. Other aspects and implementations are contemplated.
公开/授权文献
信息查询
IPC分类: