发明授权
- 专利标题: Semiconductor device and method of manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US10981608申请日: 2004-11-05
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公开(公告)号: US07173283B2公开(公告)日: 2007-02-06
- 发明人: Etsuko Fujimoto , Satoshi Murakami , Shunpei Yamazaki , Shingo Eguchi
- 申请人: Etsuko Fujimoto , Satoshi Murakami , Shunpei Yamazaki , Shingo Eguchi
- 申请人地址: JP Atsugi
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi
- 代理机构: Fish & Richardson, P.C.
- 优先权: JP2000-230401 20000731; JP2000-301389 20000929; JP2000-301390 20000929
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
A semiconductor device with high reliability and operation performance is manufactured without increasing the number of manufacture steps. A gate electrode has a laminate structure. A TFT having a low concentration impurity region that overlaps the gate electrode or a TFT having a low concentration impurity region that does not overlap the gate electrode is chosen for a circuit in accordance with the function of the circuit.
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