发明授权
US07173648B1 System and method for visually monitoring a semiconductor processing system
失效
用于视觉监测半导体处理系统的系统和方法
- 专利标题： System and method for visually monitoring a semiconductor processing system
- 专利标题（中）： 用于视觉监测半导体处理系统的系统和方法
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申请号： US09553841申请日： 2000-04-21
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公开(公告)号： US07173648B1公开(公告)日： 2007-02-06
- 发明人: Khoi Phan , Bharath Rangarajan , Bhanwar Singh , Bryan Choo
- 申请人： Khoi Phan , Bharath Rangarajan , Bhanwar Singh , Bryan Choo
- 申请人地址： US CA Sunnyvale
- 专利权人： Advanced Micro Devices, Inc.
- 当前专利权人： Advanced Micro Devices, Inc.
- 当前专利权人地址： US CA Sunnyvale
- 代理机构： Amin, Turocy, & Calvin, LLP
- 主分类号： H04N7/18
- IPC分类号： H04N7/18 ; G01N21/00
摘要：
The present invention relates to visually monitoring an interior portion of a processing chamber in a semiconductor processing system. An image collector collects images of the interior of the chamber and provides an image signal indicative of a visual representation of the interior of the chamber. A viewing station receives the image signal and displays a visual representation of the interior of the chamber.