发明授权
- 专利标题： Piezoelectric o-ring transducer
- 专利标题（中）： 压电式O型圈传感器
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申请号： US10759670申请日： 2004-01-16
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公开(公告)号： US07180227B2公开(公告)日： 2007-02-20
- 发明人: Ming-Hung Tseng , Chin-Chih Chen , Tzu-Chan Wang , Wei-Shin Tien
- 申请人： Ming-Hung Tseng , Chin-Chih Chen , Tzu-Chan Wang , Wei-Shin Tien
- 申请人地址： TW
- 专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址： TW
- 主分类号： H01L41/053
- IPC分类号： H01L41/053 ; H01L41/113
摘要：
An o-ring sealing device, molded with an imbedded piezoelectric element, for use in vacuum systems. The imbedded element, of a circumferential length, has an oblong cross-sectional shape, the oblong shape having a pair of ends for externally connecting to a signal processor. The piezoelectric element is concentrically disposed and centrally placed within a mold cavity of a predetermined diameter. The cavity is filled with an elastic material fully encapsulating and insulating the piezoelectric element.
公开/授权文献
- US20050156487A1 Piezoelectric o-ring transducer 公开/授权日：2005-07-21