发明授权
- 专利标题: Carrier head with multiple chambers
- 专利标题(中): 具有多个腔室的承载头
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申请号: US11245867申请日: 2005-10-06
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公开(公告)号: US07207871B1公开(公告)日: 2007-04-24
- 发明人: Steven M. Zuniga , Hung Chih Chen , Thomas Brezoczky , Steven T. Mear
- 申请人: Steven M. Zuniga , Hung Chih Chen , Thomas Brezoczky , Steven T. Mear
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson
- 主分类号: B24B5/00
- IPC分类号: B24B5/00
摘要:
A system for chemical mechanical polishing having a carrier head with pressurizeable chambers that can be configured into pressure zones is described. The system includes a carrier head with a membrane for contacting a substrate during polishing. Pressurizeable chambers behind the membrane are in communication with pressure inputs. The pressure inputs can each supply a different pressure to the pressurizeable chambers. Some of the pressurizeable chambers can be in communication with more than one pressure input. Zones of pressure can be arranged, where each zone includes one or more pressurizeable chambers. The zones can be configurable by altering the pressurizeable chambers that make up each zone.
公开/授权文献
- US20070082589A1 CARRIER HEAD WITH MULTIPLE CHAMBERS 公开/授权日:2007-04-12
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