发明授权
- 专利标题： Micromachine and method of producing the same
- 专利标题（中）： 微机械及其制造方法
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申请号： US10537132申请日： 2003-11-25
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公开(公告)号： US07212081B2公开(公告)日： 2007-05-01
- 发明人: Masahiro Tada , Takashi Kinoshita , Shun Mitarai , Yasuyuki Ito
- 申请人： Masahiro Tada , Takashi Kinoshita , Shun Mitarai , Yasuyuki Ito
- 申请人地址： JP Tokyo
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Sonnenschein Nath & Rosenthal LLP
- 优先权： JP2002-350639 20021203
- 国际申请： PCT/JP03/14976 WO 20031125
- 国际公布： WO2004/050545 WO 20040617
- 主分类号： H03H9/24
- IPC分类号： H03H9/24 ; B81B3/00 ; B81C1/00
摘要：
Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).
公开/授权文献
- US20060049895A1 Micromachine and method of producing the same 公开/授权日：2006-03-09
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