Invention Grant
- Patent Title: Profiling complex surface structures using height scanning interferometry
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Application No.: US11520031Application Date: 2006-09-12
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Publication No.: US07239398B2Publication Date: 2007-07-03
- Inventor: Peter J. De Groot , Robert Stoner , Xavier Colonna De Lega
- Applicant: Peter J. De Groot , Robert Stoner , Xavier Colonna De Lega
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02
Abstract:
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
Public/Granted literature
- US20070097380A1 Profiling complex surface structures using height scanning interferometry Public/Granted day:2007-05-03
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