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公开(公告)号：US07106454B2
公开(公告)日：2006-09-12
申请号：US10795808
申请日：2004-03-08
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
摘要翻译： 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于所述测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。
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公开(公告)号：US07271918B2
公开(公告)日：2007-09-18
申请号：US10795579
申请日：2004-03-08
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02011 , G01B9/02044 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/70
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
摘要翻译： 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于所述测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。 对应于多个模型的信息可以包括关于与测试对象的每个模型相对应的扫描干涉测量信号的变换的至少一个幅度分量的信息。
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公开(公告)号：US07239398B2
公开(公告)日：2007-07-03
申请号：US11520031
申请日：2006-09-12
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
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公开(公告)号：US07466429B2
公开(公告)日：2008-12-16
申请号：US11768550
申请日：2007-06-26
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
摘要翻译： 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于测试对象的多个模型的信息进行比较，其中通过测试对象的一系列特征对多个模型进行参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。
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5.发明授权Interferometer and method for measuring characteristics of optically unresolved surface features 有权用于测量光学未解析表面特征的干涉仪和方法公开(公告)号：US07948636B2
公开(公告)日：2011-05-24
申请号：US12701690
申请日：2010-02-08
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译： 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。
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公开(公告)号：US07889355B2
公开(公告)日：2011-02-15
申请号：US11757720
申请日：2007-06-04
IPC分类号： G01B9/02
CPC分类号： G01B9/02063 , G01B9/02057 , G01B9/02087 , G01B9/0209
摘要： A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
摘要翻译： 公开了一种方法，其包括：使用扫描干涉测量系统，在包括掩埋表面的物体的不同扫描位置处产生相移干涉测量图像序列，识别对应于掩埋表面的最佳焦点位置的扫描位置 根据对象的相移干涉图像的序列，并且基于相移干涉测量图像和扫描位置生成最终图像，其中最终图像中的干涉条纹相对于相位干涉图像中的干涉条纹减小， 移位干涉图像。
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7.发明申请INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALLY UNRESOLVED SURFACE FEATURES 有权用于测量光学非对称表面特征特征的干涉仪和方法公开(公告)号：US20100265516A1
公开(公告)日：2010-10-21
申请号：US12701690
申请日：2010-02-08
申请人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译： 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。
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公开(公告)号：US20090303493A1
公开(公告)日：2009-12-10
申请号：US12540709
申请日：2009-08-13
IPC分类号： G01B11/02
CPC分类号： G01B9/02063 , G01B9/02057 , G01B9/02087 , G01B9/0209
摘要： A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
摘要翻译： 公开了一种方法，其包括：使用扫描干涉测量系统，在包括掩埋表面的物体的不同扫描位置处产生相移干涉测量图像序列，识别对应于掩埋表面的最佳焦点位置的扫描位置 根据对象的相移干涉图像的序列，并且基于相移干涉测量图像和扫描位置生成最终图像，其中最终图像中的干涉条纹相对于相位干涉图像中的干涉条纹减小， 移位干涉图像。
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9.发明申请INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALLY UNRESOLVED SURFACE FEATURES 失效用于测量光学非对称表面特征特征的干涉仪和方法公开(公告)号：US20080266574A1
公开(公告)日：2008-10-30
申请号：US12017531
申请日：2008-01-22
申请人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译： 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。
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10.发明授权Interferometer and method for measuring characteristics of optically unresolved surface features 失效用于测量光学未解析表面特征的干涉仪和方法公开(公告)号：US07684049B2
公开(公告)日：2010-03-23
申请号：US12017531
申请日：2008-01-22
申请人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译： 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中，多个模型通过一系列与一个 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。
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