发明授权
US07244640B2 Method for fabricating a body contact in a Finfet structure and a device including the same 有权
用于在Finfet结构中制造身体接触的方法和包括该身体接触的装置

Method for fabricating a body contact in a Finfet structure and a device including the same
摘要:
A method for fabricating a Finfet device with body contacts and a device fabricated using the method are provided. In one example, a silicon-on-insulator substrate is provided. A T-shaped active region is defined in the silicon layer of the silicon-on-insulator substrate. A source region and a drain region form two ends of a cross bar of the T-shaped active region and a body contact region forms a leg of the T-shaped active region. A gate oxide layer is grown on the active region. A polysilicon layer is deposited overlying the gate oxide layer and patterned to form a gate, where an end of the gate partially overlies the body contact region to complete formation of a Finfet device with body contact.
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