发明授权
- 专利标题: Dual contact ring and method for metal ECP process
- 专利标题(中): 双接触环和金属ECP工艺方法
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申请号: US10664347申请日: 2003-09-16
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公开(公告)号: US07252750B2公开(公告)日: 2007-08-07
- 发明人: Chi-Wen Liu , Jung-Chih Tsao , Ke-Wei Chen , Ying-Lang Wang
- 申请人: Chi-Wen Liu , Jung-Chih Tsao , Ke-Wei Chen , Ying-Lang Wang
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Tung & Associates
- 主分类号: C25D17/00
- IPC分类号: C25D17/00
摘要:
A dual contact ring for contacting a patterned surface of a wafer and electrochemical plating of a metal on the patterned central region of the wafer and removing the metal from the outer, edge region of the wafer. The dual contact ring has an outer voltage ring in contact with the outer, edge region of the wafer and an inner voltage ring in contact with the inner, central region of the wafer. The outer voltage ring is connected to a positive voltage source and the inner voltage ring is connected to a negative voltage source. The inner voltage ring applies a negative voltage to the wafer to facilitate the plating of metal onto the patterned region of the wafer. A positive voltage is applied to the wafer through the outer voltage ring to remove the plated metal from the outer, edge region of the substrate.
公开/授权文献
- US20050056544A1 Dual contact ring and method for metal ECP process 公开/授权日:2005-03-17
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