发明授权
US07258520B2 Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
有权
使用基板载体运动来驱动基板载体门打开/关闭的方法和装置
- 专利标题： Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
- 专利标题（中）： 使用基板载体运动来驱动基板载体门打开/关闭的方法和装置
-
申请号： US10650312申请日： 2003-08-28
-
公开(公告)号： US07258520B2公开(公告)日： 2007-08-21
- 发明人: Martin R. Elliott , Michael Robert Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt , Loy Randall Stuart
- 申请人： Martin R. Elliott , Michael Robert Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt , Loy Randall Stuart
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Dugan & Dugan
- 主分类号： B65B59/00
- IPC分类号： B65B59/00 ; H01L21/67
摘要：
A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.
公开/授权文献
信息查询
