公开(公告)号：US07258520B2

公开(公告)日：2007-08-21

申请号：US10650312

申请日：2003-08-28

申请人： Martin R. Elliott ,  Michael Robert Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt ,  Loy Randall Stuart

发明人： Martin R. Elliott ,  Michael Robert Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt ,  Loy Randall Stuart

IPC分类号： B65B59/00 ,  H01L21/67

CPC分类号： H01L21/67353 ,  H01L21/67373 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67772 ,  Y10S414/139

摘要： A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.

摘要翻译： 用于打开衬底载体的系统包括具有可打开部分的衬底载体。 衬底托架还具有联接到可打开部分的打开机构。 衬底转移位置具有适于支撑衬底载体的支撑件。 基板转印位置也具有致动器机构。 致动器机构相对于支撑件定位，以便与衬底载体的开启机构相互作用。 衬底传送位置的致动器机构和衬底载体的打开机构适于在衬底传送位置处彼此接合，以便采用衬底载体的移动来实现衬底载体的打开和闭合。

公开(公告)号：US07243003B2

公开(公告)日：2007-07-10

申请号：US10650480

申请日：2003-08-28

申请人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

发明人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

IPC分类号： G06F19/00

CPC分类号： B65G37/02 ,  B65G47/61 ,  B65G2201/0297 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。

公开(公告)号：US07346431B2

公开(公告)日：2008-03-18

申请号：US11555240

申请日：2006-10-31

申请人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

发明人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

IPC分类号： G06F19/00

CPC分类号： B65G37/02 ,  B65G47/61 ,  B65G2201/0297 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。

公开(公告)号：US07792608B2

公开(公告)日：2010-09-07

申请号：US11838155

申请日：2007-08-13

申请人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

发明人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

IPC分类号： G06F19/00

CPC分类号： B65G37/02 ,  B65G47/61 ,  B65G2201/0297 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。

公开(公告)号：US07359767B2

公开(公告)日：2008-04-15

申请号：US11488873

申请日：2006-07-18

申请人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

发明人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

IPC分类号： G06F19/00

CPC分类号： B65G37/02 ,  B65G47/61 ,  B65G2201/0297 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。

公开(公告)号：US07673735B2

公开(公告)日：2010-03-09

申请号：US11838306

申请日：2007-08-14

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US07527141B2

公开(公告)日：2009-05-05

申请号：US11554876

申请日：2006-10-31

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67276 ,  H01L21/67769 ,  H01L21/67778

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

公开(公告)号：US07506746B2

公开(公告)日：2009-03-24

申请号：US11761363

申请日：2007-06-11

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US20080289932A1

公开(公告)日：2008-11-27

申请号：US11838306

申请日：2007-08-14

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G49/07

CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US07234584B2

公开(公告)日：2007-06-26

申请号：US10650310

申请日：2003-08-28

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67276 ,  H01L21/67769 ,  H01L21/67778

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。