Invention Grant
- Patent Title: Method for removing titanium dioxide deposits from a reactor
- Patent Title (中): 从反应器中除去二氧化钛沉积物的方法
-
Application No.: US10800880Application Date: 2004-03-15
-
Publication No.: US07267842B2Publication Date: 2007-09-11
- Inventor: Dingjun Wu , Bing Ji , Philip Bruce Henderson , Eugene Joseph Karwacki, Jr.
- Applicant: Dingjun Wu , Bing Ji , Philip Bruce Henderson , Eugene Joseph Karwacki, Jr.
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian; Joseph D. Rossi
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H05H1/24

Abstract:
A process for the selective removal of a TiO2-containing substance from an article for cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a TiO2-containing substance from an article comprising: providing the article having the TiO2-containing substance deposited thereupon; reacting the substance with a reactive gas comprising at least one selected from a fluorine-containing cleaning agent, a chlorine-containing cleaning agent and mixtures thereof to form a volatile product; and removing the volatile product from the article to thereby remove the substance from the article.
Public/Granted literature
- US20050202167A1 Method for removing titanium dioxide deposits from a reactor Public/Granted day:2005-09-15
Information query
IPC分类: