发明授权
- 专利标题: Method of NBTI prediction
- 专利标题(中): NBTI预测方法
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申请号: US11278827申请日: 2006-04-06
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公开(公告)号: US07268575B1公开(公告)日: 2007-09-11
- 发明人: Chia-Lin Chen , Ming-Chen Chen
- 申请人: Chia-Lin Chen , Ming-Chen Chen
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Duane Morris LLP
- 代理商 Steven E. Koffs
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
A method includes measuring a gate leakage current of at least one transistor. A single stress bias voltage is applied to the at least one transistor at a given temperature for a stress period t. The stress bias voltage causes a 10% degradation in a drive current of the transistor at the given temperature within the stress period t. A negative bias temperature instability (NBTI) lifetime τ of the transistor is estimated based on the measured gate leakage current and a relationship between drive current degradation and time observed during the applying step.
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