Invention Grant
- Patent Title: Method of NBTI prediction
- Patent Title (中): NBTI预测方法
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Application No.: US11278827Application Date: 2006-04-06
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Publication No.: US07268575B1Publication Date: 2007-09-11
- Inventor: Chia-Lin Chen , Ming-Chen Chen
- Applicant: Chia-Lin Chen , Ming-Chen Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Agent Steven E. Koffs
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
A method includes measuring a gate leakage current of at least one transistor. A single stress bias voltage is applied to the at least one transistor at a given temperature for a stress period t. The stress bias voltage causes a 10% degradation in a drive current of the transistor at the given temperature within the stress period t. A negative bias temperature instability (NBTI) lifetime τ of the transistor is estimated based on the measured gate leakage current and a relationship between drive current degradation and time observed during the applying step.
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