Invention Grant
- Patent Title: Lithographic process window optimization under complex constraints on edge placement
- Patent Title (中): 边缘放置复杂约束下的平版印刷工艺窗口优化
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Application No.: US10776901Application Date: 2004-02-10
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Publication No.: US07269817B2Publication Date: 2007-09-11
- Inventor: Fook-Luen Heng , Mark A. Lavin , Jin-Fuw Lee , Daniel L. Ostapko , Alan E. Rosenbluth , Nakgeuon Seong
- Applicant: Fook-Luen Heng , Mark A. Lavin , Jin-Fuw Lee , Daniel L. Ostapko , Alan E. Rosenbluth , Nakgeuon Seong
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent William H. Steinberq, Esq.
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method and system for layout optimization relative to lithographic process windows which facilitates lithographic constraints to be non-localized in order to impart a capability of printing a given circuit with a process window beyond the process windows which are attainable with conventional simplified design rules. Pursuant to the method and system, lithographic capability and process windows are maximized to satisfy local circuit requirements and in order to achieve a maximally efficient layout. In this connection, there is employed a method utilizing a generalized lithographic process window as a measure when layout optimization is extended to a degree beyond that achieved by the simple fixed design rules which are applied to the design rules obtained is the advantage that a lithographic process window is determined purely through the calculation of image intensities and slopes, and as a result, the method can be quite rapid in application because it is possible to take advantage of known methods for rapid calculation of image intensity, and because there is obviated the need for geometrical shape processing during optimization.
Public/Granted literature
- US20050177810A1 Lithographic process window optimization under complex constraints on edge placement Public/Granted day:2005-08-11
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