发明授权
US07285829B2 Semiconductor device having a laterally modulated gate workfunction and method of fabrication
有权
具有横向调制的栅极功能函数和制造方法的半导体器件
- 专利标题: Semiconductor device having a laterally modulated gate workfunction and method of fabrication
- 专利标题(中): 具有横向调制的栅极功能函数和制造方法的半导体器件
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申请号: US10816232申请日: 2004-03-31
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公开(公告)号: US07285829B2公开(公告)日: 2007-10-23
- 发明人: Brian Doyle , Scott A. Hareland , Mark Doczy , Robert S. Chau
- 申请人: Brian Doyle , Scott A. Hareland , Mark Doczy , Robert S. Chau
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: H01L29/72
- IPC分类号: H01L29/72
摘要:
A transistor comprising a gate electrode formed on a gate dielectric layer formed on a substrate. A pair of source/drain regions are formed in the substrate on opposite sides of the laterally opposite sidewalls of the gate electrode. The gate electrode has a central portion formed on the gate dielectric layer and over the substrate region between the source and drain regions and a pair sidewall portions which overlap a portion of the source/drain regions wherein the central portion has a first work function and said pair of sidewall portions has a second work function, wherein the second work function is different than the first work function.
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