发明授权
- 专利标题： Method for the rapid thermal control of a work piece in liquid or supercritical fluid
- 专利标题（中）： 液体或超临界流体中工件快速热控制的方法
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申请号： US11128022申请日： 2005-05-12
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公开(公告)号： US07288155B2公开(公告)日： 2007-10-30
- 发明人: John P. Simons , Kenneth J. McCullough , Wayne M. Moreau , John M. Cotte , Keith R. Pope , Charles J. Taft , Dario Goldfarb
- 申请人： John P. Simons , Kenneth J. McCullough , Wayne M. Moreau , John M. Cotte , Keith R. Pope , Charles J. Taft , Dario Goldfarb
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Perman & Green, LLP
- 代理商 Daniel P. Morris, Esq.
- 主分类号： B08B3/00
- IPC分类号： B08B3/00 ; B08B7/04
摘要：
A method for cleaning a semiconductor structure including providing a chamber for holding the semiconductor structure and a dense phase fluid, providing a thermal transfer device having a thermal transfer surface, connecting the thermal transfer device to the chamber, placing the semiconductor structure in the chamber in contact with the thermal transfer surface and thermally cycling the thermal transfer surface.
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