Invention Grant
- Patent Title: Tin deposition
- Patent Title (中): 锡沉积
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Application No.: US10685659Application Date: 2003-10-14
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Publication No.: US07314543B2Publication Date: 2008-01-01
- Inventor: Ming Fang , Valery M. Dubin , Scott M. Haight
- Applicant: Ming Fang , Valery M. Dubin , Scott M. Haight
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: C25D5/02
- IPC: C25D5/02 ; C25D7/12 ; C25D3/30 ; C25D3/32

Abstract:
A device includes an integrated circuit and a deposited tin in electrical contact with a portion of the integrated circuit. The deposited tin is formed by electrodeposition from a bath. The deposited tin includes a residue characteristic of the bath. The bath includes a bath-soluble tin compound, a strong acid, and a sulfopropylated anionic surfactant. In another aspect, a composition includes between approximately 20 and 40 grams per liter of one of stannous methane sulfonate, stannous sulfate, and a mixture thereof, between approximately 100 and 200 grams per liter of one of methanesulfonic acid, sulfuric acid, and a mixture thereof, and between approximately 1 and 2 grams per liter of one or more polyethyleneglycol alkyl-3-sulfopropyl diethers. In another aspect, a method includes electroplating tin with a current density of greater than approximately 30 mA/cm2 and a plating efficiency of greater than approximately 95%.
Public/Granted literature
- US20050077082A1 Tin deposition Public/Granted day:2005-04-14
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