Invention Grant
- Patent Title: Xenon ion beam to improve track width definition
- Patent Title (中): 氙离子束提高轨道宽度定义
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Application No.: US10827950Application Date: 2004-04-20
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Publication No.: US07320170B2Publication Date: 2008-01-22
- Inventor: Stuart Kao , Chunping Luo , Chaopeng Chen , Takahiko Machita , Daisuke Miyauchi , Jei-Wei Chang
- Applicant: Stuart Kao , Chunping Luo , Chaopeng Chen , Takahiko Machita , Daisuke Miyauchi , Jei-Wei Chang
- Applicant Address: US CA Milpitas JP Tokyo
- Assignee: Headway Technologies, Inc.,TDK Corporation
- Current Assignee: Headway Technologies, Inc.,TDK Corporation
- Current Assignee Address: US CA Milpitas JP Tokyo
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: G11B5/187
- IPC: G11B5/187 ; C23F1/02

Abstract:
Using a beam of xenon ions together with a suitable mask, a GMR stack is ion milled until a part of it, no more than about 0.1 microns thick, has been removed so that a pedestal, having sidewalls comprising a vertical section that includes all of the free layer, has been formed. This is followed by formation of the longitudinal bias and conductive lead layers in the usual way. Using xenon as the sputtering gas enables the point at which milling is terminated to be more precisely controlled.
Public/Granted literature
- US20050231856A1 Xenon ion beam to improve track width definition Public/Granted day:2005-10-20
Information query
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