发明授权
US07331307B2 Thermally sprayed member, electrode and plasma processing apparatus using the electrode
有权
使用电极的热喷涂部件，电极和等离子体处理装置
- 专利标题： Thermally sprayed member, electrode and plasma processing apparatus using the electrode
- 专利标题（中）： 使用电极的热喷涂部件，电极和等离子体处理装置
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申请号： US11055058申请日： 2005-02-11
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公开(公告)号： US07331307B2公开(公告)日： 2008-02-19
- 发明人: Daisuke Hayashi
- 申请人： Daisuke Hayashi
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2004-037094 20040213
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; C23C16/50 ; C23C16/503 ; H01L21/306 ; H01L21/3065
摘要：
A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic material and the thermally sprayed film for increasing a bonding force therebetween, wherein the thermally sprayed film side of the member is exposed to a high frequency plasma atmosphere and the electrode is intended to form a high frequency plasma on the side of the thermally sprayed film. The basic material includes a base portion made of a conductive material and a dielectric portion provided to include a part of a surface of the basic material. Further, the intermediate layer is comprised of a plurality of island-shaped parts isolated from each other.
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