发明授权
- 专利标题: Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
- 专利标题(中): 多功能硬x射线纳米探针仪的机械结构
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申请号: US11238196申请日: 2005-09-29
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公开(公告)号: US07331714B2公开(公告)日: 2008-02-19
- 发明人: Deming Shu , Jorg M. Maser , Barry Lai , Franz Stefan Vogt , Martin V. Holt , Curt A. Preissner , Robert P. Winarski , Gregory B. Stephenson
- 申请人: Deming Shu , Jorg M. Maser , Barry Lai , Franz Stefan Vogt , Martin V. Holt , Curt A. Preissner , Robert P. Winarski , Gregory B. Stephenson
- 申请人地址: US IL Chicago
- 专利权人: UChicago Argonne, LLC
- 当前专利权人: UChicago Argonne, LLC
- 当前专利权人地址: US IL Chicago
- 代理商 Joan Pennington
- 主分类号: H05G1/00
- IPC分类号: H05G1/00 ; G21K1/06 ; G01N23/083 ; G01N23/20 ; G01N23/223
摘要:
A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.
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