Invention Grant
- Patent Title: Transistor structure of memory device and method for fabricating the same
- Patent Title (中): 存储器件的晶体管结构及其制造方法
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Application No.: US11201951Application Date: 2005-08-10
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Publication No.: US07332755B2Publication Date: 2008-02-19
- Inventor: Se Aug Jang , Yong Soo Kim , Jae Geun Oh , Jae Sung Roh , Hyun Chun Sohn
- Applicant: Se Aug Jang , Yong Soo Kim , Jae Geun Oh , Jae Sung Roh , Hyun Chun Sohn
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Townsend and Townsend and Crew LLP
- Priority: KR10-2005-0036056 20050429
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
A memory device includes an active area protruding from a semiconductor substrate. A recess is formed in the active area. A field oxide layer is formed on the semiconductor substrate. A gate electrode extends across the active area while being overlapped with the recess. A gate insulation layer is interposed between the gate electrode and the active area. Source and drain areas are formed in the active area. The transistor structure above defines a recessed transistor structure if it is sectioned along a source-drain line and defines a Fin transistor structure if it is sectioned along a gate line. The transistor structure ensures sufficient data retention time and improves the current drivability while lowering the back bias dependency of a threshold voltage.
Public/Granted literature
- US20060244055A1 Transistor structure of memory device and method for fabricating the same Public/Granted day:2006-11-02
Information query
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