Invention Grant
- Patent Title: Method and apparatus to determine consumable part condition
- Patent Title (中): 确定消耗品部件状况的方法和装置
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Application No.: US11018253Application Date: 2004-12-22
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Publication No.: US07350476B2Publication Date: 2008-04-01
- Inventor: Steven T. Fink
- Applicant: Steven T. Fink
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Main IPC: G01D21/00
- IPC: G01D21/00 ; G01N21/00 ; C23C16/00 ; C23C16/52 ; H01L21/306

Abstract:
A system for monitoring a condition of a consumable component in a substrate processing system that includes a tapered plug having a first axis, a second axis that intersects the first axis, a top portion with first width, a bottom portion with a second width, and sidewalls joining said top and bottom portions respectively. The tapered plug has a cross sectional profile that is substantially parallel to the top and bottom portions and a cross sectional width that varies according to a location where the cross sectional profile intersects the second axis. At least one of the tapered plugs is inserted into at least one consumable component of the substrate processing system such that the top portion of the tapered plug is exposed to a processing environment of a plasma processing system.
Public/Granted literature
- US20060130970A1 Method and apparatus to determine consumable part condition Public/Granted day:2006-06-22
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