发明授权
- 专利标题: Low loss interconnect structure for use in microelectronic circuits
- 专利标题(中): 用于微电子电路的低损耗互连结构
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申请号: US11152643申请日: 2005-06-14
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公开(公告)号: US07352059B2公开(公告)日: 2008-04-01
- 发明人: Frank O'Mahony , Mark A. Anders , Krishnamurthy Soumyanath
- 申请人: Frank O'Mahony , Mark A. Anders , Krishnamurthy Soumyanath
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwegman, Lundberg & Woessner, P.A.
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; H01L23/52 ; H01L23/522 ; H01R12/00
摘要:
A low loss on-die interconnect structure includes first and second differential signal lines on one of the metal layers of a microelectronic die. One or more traces may also be provided on another metal layer of the die that are non-parallel (e.g., orthogonal) to the differential signal lines. Because the traces are non-parallel, they provide a relatively high impedance return path for signals on the differential signal lines. Thus, a signal return path through the opposite differential line predominates for the signals on the differential lines. In one application, the low loss interconnect structure is used within an on-die salphasic clock distribution network.
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